JPH039608B2 - - Google Patents

Info

Publication number
JPH039608B2
JPH039608B2 JP60088927A JP8892785A JPH039608B2 JP H039608 B2 JPH039608 B2 JP H039608B2 JP 60088927 A JP60088927 A JP 60088927A JP 8892785 A JP8892785 A JP 8892785A JP H039608 B2 JPH039608 B2 JP H039608B2
Authority
JP
Japan
Prior art keywords
gas
gas ejection
central axis
ejection plate
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60088927A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61248517A (ja
Inventor
Yasuhiro Ishii
Yoshimoto Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP60088927A priority Critical patent/JPS61248517A/ja
Publication of JPS61248517A publication Critical patent/JPS61248517A/ja
Publication of JPH039608B2 publication Critical patent/JPH039608B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/24—
    • H10P14/2922—
JP60088927A 1985-04-26 1985-04-26 化合物半導体薄膜の製造装置 Granted JPS61248517A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60088927A JPS61248517A (ja) 1985-04-26 1985-04-26 化合物半導体薄膜の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60088927A JPS61248517A (ja) 1985-04-26 1985-04-26 化合物半導体薄膜の製造装置

Publications (2)

Publication Number Publication Date
JPS61248517A JPS61248517A (ja) 1986-11-05
JPH039608B2 true JPH039608B2 (OSRAM) 1991-02-08

Family

ID=13956536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60088927A Granted JPS61248517A (ja) 1985-04-26 1985-04-26 化合物半導体薄膜の製造装置

Country Status (1)

Country Link
JP (1) JPS61248517A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3084232B2 (ja) * 1996-06-04 2000-09-04 イートン コーポレーション 縦型加熱処理装置
KR101223489B1 (ko) * 2010-06-30 2013-01-17 삼성디스플레이 주식회사 기판 가공 장치

Also Published As

Publication number Publication date
JPS61248517A (ja) 1986-11-05

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