JPH0392030U - - Google Patents
Info
- Publication number
- JPH0392030U JPH0392030U JP15263489U JP15263489U JPH0392030U JP H0392030 U JPH0392030 U JP H0392030U JP 15263489 U JP15263489 U JP 15263489U JP 15263489 U JP15263489 U JP 15263489U JP H0392030 U JPH0392030 U JP H0392030U
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- frequency power
- power source
- electrodes
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15263489U JP2506617Y2 (ja) | 1989-12-29 | 1989-12-29 | グロ―放電型成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15263489U JP2506617Y2 (ja) | 1989-12-29 | 1989-12-29 | グロ―放電型成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0392030U true JPH0392030U (cs) | 1991-09-19 |
| JP2506617Y2 JP2506617Y2 (ja) | 1996-08-14 |
Family
ID=31698887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15263489U Expired - Fee Related JP2506617Y2 (ja) | 1989-12-29 | 1989-12-29 | グロ―放電型成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2506617Y2 (cs) |
-
1989
- 1989-12-29 JP JP15263489U patent/JP2506617Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2506617Y2 (ja) | 1996-08-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |