JPH0392030U - - Google Patents
Info
- Publication number
- JPH0392030U JPH0392030U JP15263489U JP15263489U JPH0392030U JP H0392030 U JPH0392030 U JP H0392030U JP 15263489 U JP15263489 U JP 15263489U JP 15263489 U JP15263489 U JP 15263489U JP H0392030 U JPH0392030 U JP H0392030U
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- frequency power
- power source
- electrodes
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 3
Description
第１図は本考案の一実施例によるグロー放電型
成膜装置の概略断面構成図、第２図及び第３図は
その等価回路図、第４図は従来のグロー放電型成
膜装置の概略断面構成図、第５図はその等価回路
図である。
２０……成膜室、２１，２２……高周波電極、
２８，２９……可変コンデンサ（調節手段）、３
１……高周波電源、３２……並列回路、３３……
コイル、３４……可変コンデンサ、３６，３７…
…基板、４１……高周波電極間のコンデンサ容量
。
Fig. 1 is a schematic cross-sectional configuration diagram of a glow discharge type film forming apparatus according to an embodiment of the present invention, Figs. 2 and 3 are equivalent circuit diagrams thereof, and Fig. 4 is a schematic diagram of a conventional glow discharge type film forming apparatus. The cross-sectional configuration diagram and FIG. 5 are its equivalent circuit diagrams. 20... Film forming chamber, 21, 22... High frequency electrode,
28, 29...variable capacitor (adjustment means), 3
1...High frequency power supply, 32...Parallel circuit, 33...
Coil, 34... Variable capacitor, 36, 37...
...Substrate, 41...Capacitor capacity between high frequency electrodes.
Claims (1)
向する第１、第２の高周波電極と、前記各高周波
電極に高周波電力を投入するための高周波電源と
、前記各高周波電極と高周波電源との間に設けら
れ各高周波電極と基板との間のプラズマ強度を調
節する調節手段と、前記第１、第２の高周波電極
間に生ずる静電容量と並列共振回路を形成し得る
並列回路とを備えたグロー放電型成膜装置。 first and second high-frequency electrodes arranged with a predetermined gap therebetween and facing the substrate, a high-frequency power source for supplying high-frequency power to each of the high-frequency electrodes, and between each high-frequency electrode and the high-frequency power source; and a parallel circuit capable of forming a parallel resonant circuit with the electrostatic capacitance generated between the first and second high frequency electrodes. Discharge type film forming equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15263489U JP2506617Y2 (en) | 1989-12-29 | 1989-12-29 | Glow discharge type film deposition equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15263489U JP2506617Y2 (en) | 1989-12-29 | 1989-12-29 | Glow discharge type film deposition equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0392030U true JPH0392030U (en) | 1991-09-19 |
| JP2506617Y2 JP2506617Y2 (en) | 1996-08-14 |
Family
ID=31698887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15263489U Expired - Fee Related JP2506617Y2 (en) | 1989-12-29 | 1989-12-29 | Glow discharge type film deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2506617Y2 (en) |
-
1989
- 1989-12-29 JP JP15263489U patent/JP2506617Y2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2506617Y2 (en) | 1996-08-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |