JPS6237083U - - Google Patents
Info
- Publication number
- JPS6237083U JPS6237083U JP12811885U JP12811885U JPS6237083U JP S6237083 U JPS6237083 U JP S6237083U JP 12811885 U JP12811885 U JP 12811885U JP 12811885 U JP12811885 U JP 12811885U JP S6237083 U JPS6237083 U JP S6237083U
- Authority
- JP
- Japan
- Prior art keywords
- discharge electrode
- electrode plate
- divided
- electrode plates
- frequency power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12811885U JPS641958Y2 (cs) | 1985-08-21 | 1985-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12811885U JPS641958Y2 (cs) | 1985-08-21 | 1985-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6237083U true JPS6237083U (cs) | 1987-03-05 |
| JPS641958Y2 JPS641958Y2 (cs) | 1989-01-18 |
Family
ID=31023499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12811885U Expired JPS641958Y2 (cs) | 1985-08-21 | 1985-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS641958Y2 (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001168044A (ja) * | 1999-12-14 | 2001-06-22 | Sharp Corp | プラズマｃｖｄ装置およびそれを用いた薄膜製造方法並びに薄膜太陽電池の製造方法 |
| JP2009231247A (ja) * | 2008-03-25 | 2009-10-08 | Tokyo Electron Ltd | プラズマ処理装置及び高周波電力の供給方法 |
-
1985
- 1985-08-21 JP JP12811885U patent/JPS641958Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001168044A (ja) * | 1999-12-14 | 2001-06-22 | Sharp Corp | プラズマｃｖｄ装置およびそれを用いた薄膜製造方法並びに薄膜太陽電池の製造方法 |
| JP2009231247A (ja) * | 2008-03-25 | 2009-10-08 | Tokyo Electron Ltd | プラズマ処理装置及び高周波電力の供給方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS641958Y2 (cs) | 1989-01-18 |
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