JPH0392029U - - Google Patents
Info
- Publication number
- JPH0392029U JPH0392029U JP55590U JP55590U JPH0392029U JP H0392029 U JPH0392029 U JP H0392029U JP 55590 U JP55590 U JP 55590U JP 55590 U JP55590 U JP 55590U JP H0392029 U JPH0392029 U JP H0392029U
- Authority
- JP
- Japan
- Prior art keywords
- exposed object
- detection
- wavelength
- data
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 3
- 230000003287 optical effect Effects 0.000 claims 3
- 238000005286 illumination Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55590U JPH0392029U (US20100268047A1-20101021-C00003.png) | 1990-01-10 | 1990-01-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55590U JPH0392029U (US20100268047A1-20101021-C00003.png) | 1990-01-10 | 1990-01-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0392029U true JPH0392029U (US20100268047A1-20101021-C00003.png) | 1991-09-19 |
Family
ID=31504497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55590U Pending JPH0392029U (US20100268047A1-20101021-C00003.png) | 1990-01-10 | 1990-01-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0392029U (US20100268047A1-20101021-C00003.png) |
-
1990
- 1990-01-10 JP JP55590U patent/JPH0392029U/ja active Pending
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