JPH0383825U - - Google Patents

Info

Publication number
JPH0383825U
JPH0383825U JP1989146141U JP14614189U JPH0383825U JP H0383825 U JPH0383825 U JP H0383825U JP 1989146141 U JP1989146141 U JP 1989146141U JP 14614189 U JP14614189 U JP 14614189U JP H0383825 U JPH0383825 U JP H0383825U
Authority
JP
Japan
Prior art keywords
heat
sensitive resistor
sensitive
rectifying
rectifying net
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989146141U
Other languages
English (en)
Other versions
JP2524144Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989146141U priority Critical patent/JP2524144Y2/ja
Priority to KR2019900017334U priority patent/KR930005043Y1/ko
Priority to US07/627,452 priority patent/US5163322A/en
Priority to DE4040375A priority patent/DE4040375C2/de
Publication of JPH0383825U publication Critical patent/JPH0383825U/ja
Application granted granted Critical
Publication of JP2524144Y2 publication Critical patent/JP2524144Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)

Description

【図面の簡単な説明】
第１図は、この考案の一実施例である感熱式流
量センサの要部構成を示す正面図、第２図は、第
１図の流量センサにおける特性図、第３図は、従
来の感熱式流量センサを示す構成図、第４図、第
５図は、第３図における流量センサの要部構成を
示す正面図、第６図、第７図は感熱抵抗体の構成
を示す概要図である。 図中、１……導管、２……整流用ネツト、２ａ
……線材、３……感熱抵抗体、４……制御回路。
なお、図中同一符号は同一または相当部分を示す
ものとする。

Claims (1)

    【実用新案登録請求の範囲】
  1. 被測定流体を案内する導管と、この導管内に配
    置された感熱抵抗体と、この感熱抵抗体の上流側
    に設けられ、上記流体の流れを整流する整流用ネ
    ツトとを備えた感熱式流量センサにおいて、上記
    感熱抵抗体の幅または直径の２０倍以内の距離を
    もつて上記感熱抵抗体および整流用ネツトを対向
    配置するとともに上記感熱抵抗体の軸線と上記整
    流用ネツトの線材との相対角度が１０°〜８０°
    となるように上記感熱抵抗体および上記整流用ネ
    ツトを取り付けたことを特徴とする感熱式流量セ
    ンサ。
JP1989146141U 1989-12-18 1989-12-18 感熱式流量センサ Expired - Lifetime JP2524144Y2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP1989146141U JP2524144Y2 (ja) 1989-12-18 1989-12-18 感熱式流量センサ
KR2019900017334U KR930005043Y1 (ko) 1989-12-18 1990-11-13 감열식 유량센서
US07/627,452 US5163322A (en) 1989-12-18 1990-12-14 Thermal flow sensor
DE4040375A DE4040375C2 (de) 1989-12-18 1990-12-17 Thermischer Durchflußmengenmesser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989146141U JP2524144Y2 (ja) 1989-12-18 1989-12-18 感熱式流量センサ

Publications (2)

Publication Number Publication Date
JPH0383825U true JPH0383825U (ja) 1991-08-26
JP2524144Y2 JP2524144Y2 (ja) 1997-01-29

Family

ID=15401071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989146141U Expired - Lifetime JP2524144Y2 (ja) 1989-12-18 1989-12-18 感熱式流量センサ

Country Status (4)

Country Link
US (1) US5163322A (ja)
JP (1) JP2524144Y2 (ja)
KR (1) KR930005043Y1 (ja)
DE (1) DE4040375C2 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE36489E (en) * 1994-04-06 2000-01-11 Janos Technology Inc. Spectral analyzer with new high efficiency collection optics and method of using same
DE10027831C2 (de) * 2000-06-05 2002-08-01 Siemens Ag Massenstrommesser
TWI220540B (en) * 2003-07-18 2004-08-21 Au Optronics Corp Buffer of pressure gauge sensor used in dry etching reaction chamber
US7905153B2 (en) * 2009-04-24 2011-03-15 Mann+Hummel Gmbh Flow vortex suppression apparatus for a mass air flow sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173747U (ja) * 1985-04-18 1986-10-29
JPS62232517A (ja) * 1986-04-02 1987-10-13 Hitachi Ltd 熱線式空気流量計

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3687130A (en) * 1969-11-26 1972-08-29 Pelam Inc Instrument to measure pulmonary function
EP0008185B1 (en) * 1978-08-05 1983-06-08 Nissan Motor Co., Ltd. Flowmeter of hot wire type
DE2934137C2 (de) * 1978-08-25 1985-05-15 Nissan Motor Co., Ltd., Yokohama, Kanagawa Strömungsmeßanordnung zum Messen einer Strömungsmenge in einem rohrförmigen Kanal
DE3009382A1 (de) * 1980-03-12 1981-09-24 Degussa Ag, 6000 Frankfurt Vorrichtung zur messung der stroemungsgeschwindigkeiten von gasen und fluessigkeiten
US4433576A (en) * 1982-09-20 1984-02-28 General Motors Corporation Mass airflow sensor
DE3855552T2 (de) * 1987-10-23 1997-02-20 Hitachi Ltd Heissdraht-Luftdurchflussmesser und dessen Verwendung in einer Brennkraftmaschine

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173747U (ja) * 1985-04-18 1986-10-29
JPS62232517A (ja) * 1986-04-02 1987-10-13 Hitachi Ltd 熱線式空気流量計

Also Published As

Publication number Publication date
JP2524144Y2 (ja) 1997-01-29
DE4040375A1 (de) 1991-06-27
KR930005043Y1 (ko) 1993-07-29
KR910012243U (ko) 1991-07-30
US5163322A (en) 1992-11-17
DE4040375C2 (de) 1996-10-24

Similar Documents

Publication Publication Date Title
JPH0383825U (ja)
JPS61176609U (ja)
JPH0288114U (ja)
JPH01112432U (ja)
JPH0161619U (ja)
JPH02128959U (ja)
JPS6165313U (ja)
JPS6160104U (ja)
JPS63111615U (ja)
JPH0337849U (ja)
JPS63195230U (ja)
JPH0235030U (ja)
JPS63150324U (ja)
JPS61135269U (ja)
JPS61193322U (ja)
JPS6195421U (ja)
JPS61198364U (ja)
JPS6142902U (ja) 呼吸時の流量測定装置
JPS6213116U (ja)
JPS61184193U (ja)
JPS60191936U (ja) 熱線式流量計
JPS6165312U (ja)
JPH0485143U (ja)
JPS61193323U (ja)
JPH03111622U (ja)

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term