JPH0381654A - Radiation measuring instrument - Google Patents

Abstract

PURPOSE:To detect radiation from a radiation source directly without any influence of a sample holder and to easily and accurately return the holder to its original position by allowing the sample holder of a goniometer to slant freely. CONSTITUTION:When a rotation introducing machine 11 is rotated, a sample holder setting base 19 provided to a goniometer part 5 in a vacuum container 1 slants about a rotor 12A, etc., through an eccentric shaft 11A against the elastic force of a spring 19D and the sample holder 21 for a sample 10 to be measured on the base 19 slants. Then the radiation X rays from an X-ray genera tion part provided on the internal wall of vacuum chamber 1 provided with an observation hold 1A are made incident directly on a detection part 7 without being affected by the holder 21 and detected. When the introducing machine 11 reverses, the holder 21 is easily and accurately returned to its original posi tion with the elastic force of the spring 19D and the whole constitution is re duced in size.

Description

Detailed Description of the Invention Object of the Invention 1 (Industrial Application Field) The present invention relates to a radiation measuring device that measures radiation such as X-rays, and in particular to an X-ray exposure device, an X-ray microscope, an X-ray telescope, The present invention also relates to a radiation measurement device that improves the direct beam measurement method in reflectance measurement devices such as mirrors and monochromators used in general X-ray analysis devices.

(Prior Art) An example of a conventional radiation measuring device will be described with reference to FIG. 4.

This conventional radiation measuring device has an X-ray generating section (not shown), an X-ray detecting section 107, and a goniometer section 105 (not shown) arranged in a vacuum container 101, and the goniometer section 105 and the X-ray detecting section 105 are disposed below the goniometer section 105. A driving part 109 is provided to rotate the part 107 in the horizontal direction, and the holder part 121 of the goniometer part 105, which holds the sample 10 to be measured by engaging with the projection part 121A on the upper part of the goniometer part 105, is provided at the upper part. A lifting operation shaft 111 is attached.

During direct beam measurement, the operation shaft 111 is pulled up and the holder section 121 that holds the sample to be measured 10 is moved from between the opposing X-ray generating section and the X-ray detecting section 107.
X-rays emitted from the X-ray generating section are directly transmitted to the X-ray detecting section 107
Move upward to a comfortable height. Furthermore, when the direct beam measurement is completed, the operating shaft 111 is pushed down to return the holder portion 121 to its original position.

At this time, the protruding part 121B at the lower part of the holder part 121 is fitted into the guide hole 113A provided on the upper surface of the θ axis 113 at the lower part of the goniometer part 105, and the holder part 121
The holder portion 121, that is, the sample to be measured 10 is positioned by a part of the side surface of the holder portion 121 being brought into contact with a reference plate 113B on the θ axis 113.

(Problems to be Solved by the Invention) However, in the conventional radiation measuring device described above, a predetermined portion of the surface of the sample to be measured 10 is aligned with the rotation center of the θ axis 113 of the goniometer section 105, and
! It is necessary to match the zero line of the measurement system constituted by the generation section and the X-ray detection section 107. Therefore, the protrusion 121B and guide hole 113 for positioning
A and the reference plate 113B require high accuracy, and skill is required for operating the operating shaft 111 during initial setting and resetting after direct beam setting.

On the other hand, in order to facilitate the operation of the operation shaft 111, a protrusion 121 +3, a guide hole 113A and a reference plate 113B are provided.
It is conceivable to give so-called play in the positional relationship between the two. However, due to this play, the goniometer section 105 is located at the surface position of the sample to be measured 10 with respect to the zero line.
This causes play in the rotational direction with respect to the center of rotation of the θ-axis 113. Therefore, an angular error occurs in the rotation angle 2θ of the X-ray detector with respect to the rotation angle θ of the sample to be measured 10, making it difficult to improve the accuracy of the goniometer.

In addition, when measuring the direct beam, the sample to be measured 10
Since the holder part 121 holding the It was done.

Furthermore, by enlarging the vacuum container 101,
The ultimate vacuum (usually 10'
In order to obtain a pressure of 4 to 1 O-7 Torr), a pump with a larger exhaust capacity must be used, leading to an increase in the size of the device and the cost.

The present invention has been made in view of the above-mentioned circumstances, and an object thereof is to provide a radiation measuring device in which the goniometer section can be easily and accurately reset after direct beam measurement, and the device can be miniaturized. It is about providing.

[Structure of the invention] (Means for solving the problem) In order to achieve the above object, the radiation measuring device of the present invention has the following features:
Group 9Ali! which emits radiation from a radiation source and detects and measures the reflected radiation from the object to be measured held by the holding means of the goniometer section using the detection means! The measuring device is configured to include a tilting means for tilting the holding means to a position where the radiation emitted from the radiation source is incident on the detection means without being influenced by the object to be measured.

(Function) In the radiation measurement device of the present invention, radiation is emitted from the radiation source toward the detection means, and the emitted I31 rays are emitted by the surface of the object to be measured in the goniometer section interposed between the radiation source and the detection means. is detected by a detection means. In addition, when measuring the direct beam, the holding means that holds the object to be measured is tilted by the tilting means, so that the object to be measured is affected by the radiation tJA rays emitted from the DAwA source. This allows it to be detected without being detected.

(Example) Hereinafter, the present invention will be explained in detail using the drawings.

FIG. 1 is a front view showing a cross section of an embodiment of the radiation measuring device of the present invention, and FIG. 2 is a side view of the same.

The t1i copper wire measuring device of this embodiment includes a vacuum container 1, an X-ray generating section 3 as a radiation source disposed in the vacuum container,
It is composed of a goniometer section 5, a detection section 7, and a drive section 9.

The vacuum container 1 is configured to maintain the inside of the container in a vacuum state and to shield radiation and the like. In addition, an observation window IA for observing the inside of the vacuum vessel 1 is provided on one side wall surface of the vacuum vessel 1 so as to be openable and closable. AI is provided with a rotation introduction machine 11 which will be described later. Furthermore, a drive section 9 constituted by a cylindrical worm gear is disposed on the bottom of the container. This drive unit 9 is composed of a θ-axis drive unit 9A that rotationally drives the goniometer unit 5 in the container, and a 20-axis drive unit 9B that rotationally drives the detection unit 7, each having the same rotation center.

The X-ray generating section 3 is fixed to the inner surface of the side wall of the vacuum container 1 adjacent to the side wall where the observation window 1A is provided, and emits X-rays in a so-called pencil beam shape with little spread in a substantially horizontal direction.

Next, the configuration of the goniometer section 5 will be explained.

The θ-axis 13 is a disk-shaped rotating shaft body rotated by the θ-axis drive unit 9a, and on which the θ-axis stand 15 is placed.

The θ-axis stand 15 is a cylindrical body fixed on the θ-axis 13, and grooves for holding the rollers 17A and 17B are carved in parallel on the upper surface at a predetermined distance apart.

The sample holder setting table 19 is placed on the θ-axis table 15 via rollers 17A and 17B, and the rotation introduction device 1 is mounted on the lower surface.
A groove for holding the roller 17A from above is carved at a position facing the roller 17A on the first side.

Further, referring to FIG. 2, rollers 19A and 19B are provided on both left and right sides of one sample holder setting table. Each of the rollers 19A and 19B has two truncated cones whose bottoms are connected to each other, and a hole passing through between the two truncated surfaces.
It has a so-called abacus bead shape. Further, the roller 19A is held by rotatably fitting a hole in the roller 19A to a shaft that stands directly on the sample holder setting table 19. Roller 19B
The ends of two parallel plates are connected by a plate that is perpendicular to the ends, and the shaft of the member forming a U-shape is supported by the two parallel plates of the roller 19B. It is rotatably fitted into the hole and held. Further, the U-shaped member 19C has a spring 19D.
is urged toward the roller 19A.

In addition, the lower surface of the left and right sides of the sample holder setting table 19 and the θ axis 13
A tension coil spring 19D is attached between the sample holder setting table 19 and the sample holder setting table 19, respectively.

Further, a bearing pedestal 19E is protruded from the end of the sample holder setting table 19 on the side of the rotation introduction device 11, and a bearing 9F for holding the eccentric shaft 11A at the tip of the rotation introduction device 11 is installed on this bearing pedestal 19E. Ru. Therefore, by turning the rotation introduction device 11, the eccentric shaft 11A rotates eccentrically, pushing down the bearing 19F and moving the roller 17B side of the sample holder setting table 19 to the roller 1.
7A as the center of rotation and push up against the bias of the tension coil spring 19D.

The sample holder 21 brings the sample 10 to be measured into close contact with a reference surface inside the front surface of the sample holder 21 so that a plane including the surface of the sample 10 to be measured substantially coincides with the radiation center of the X-rays emitted from the X-ray generating section 3. , and hold it so that it is approximately vertical. In addition, in order to keep the sample to be measured 10 in close contact with the reference surface of the sample boulder 21 regardless of the thickness of the sample to be measured 10, a threaded ring 23 screwed into the rear inner side of the sample holder 21 and a screw ring 23 screwed into the inside of the rear part of the sample holder 21 and Spring 2 interposed between the back and the
5 to press from the back side.

In addition, grooves that fit with the rollers 19A and 19B are carved in the lower portions of both sides of the sample holder 21 on the rollers 19A and 19B sides.

The detection section 7 is composed of a slit 7A and a detector 7B. An arbitrary detection means such as a microchannel plate is used as the detector 7B, and the intensity of the required dose of X-rays incident through the slit 7A is measured.

Next, the operation of this embodiment will be explained with reference to FIGS. 1 to 3.

First, after inserting the sample 10 to be measured into the sample holder 21,
The screw ring 23 is screwed in to bring the surface of the sample 10 to be measured into close contact with the reference surface inside the front edge of the sample holder 21. After placing the sample holder 21 with the sample 10 set thereon on the sample holder setting table 19, the protrusions of the rollers 19A and 19B are engaged with the grooves on both sides of the lower part of the sample holder 21, and the sample holder 21 is The lower tip is the sample holder setting table 19
Move until it touches the reference surface. As a result, the surface of the sample to be measured 10 and the radiation center of the X-rays emitted from the X-ray generating section 3 substantially coincide.

When detecting reflected X-rays, first drive the drive section 9 as shown in FIG.
Move to a position facing the wA generating section 3. X at this time
1:t, 4k, that is, the zero line connecting the line generating section 3 and the detecting section 7 coincides with the surface of the sample 10 to be measured. Thereafter, measurements are performed while sequentially driving the drive section 9. At this time,
While the sample to be measured 10 rotates by θ degrees, the detection section 7 rotates by 20 degrees.

Next, the case of direct beam measurement will be explained.

Rotating the rotation introducing device 11, the sample holder setting table 19 is pushed up against the bias of the tension coil spring 19D, with the roller 17A as the center of rotation. At this time, the sample holder setting table 19
The sample holder 21 placed and fixed thereon is tilted, and the surface of the sample 10 to be measured deviates from the center of radiation of the X-rays. Therefore, the X-rays emitted from the X-ray generating section 3 enter the detecting section 7 without being affected by the sample to be measured 10, and
Direct beam measurements are taken.

After the direct beam measurement is completed, the rotating introduction device 11 is rotated in the opposite direction to return the sample holder setting table 19 to its original position. At this time, the roller 17A and the tension coil spring 19
By urging D forward and downward, the sample holder setting table 19 is precisely positioned.

As described above, according to this embodiment, direct beam measurements can be easily performed by tilting the sample holder 21, so that precise measurements can be performed without requiring a high degree of skill. can. Furthermore, the device is made smaller, making it easier to shorten the evacuation time and downsize the evacuation device.

[Effects of the Invention] As explained above, according to the present invention, the radiation emitted from the radiation source due to the tilting of the holding means that holds the object to be measured enters the detection means without being affected by the holding means. This makes it possible to easily and precisely reset the holding means when returning it to its original position after tilting.
It also has the effect of contributing to miniaturization of the device.

[Brief explanation of drawings]

FIG. 1 is a front sectional view showing an embodiment of the present invention, FIG. 2 is a side view of FIG. FIG. 2 is a sectional view showing a conventional example. 1... Vacuum container 3... X-ray generation section 5...
・Goniometer section 7...Detection section 9...Drive section
10... Sample to be measured 11... Rotating introduction 1
11A...Eccentric shaft 13...θ axis 1
5... θ axis stand 17A, 17B... Roller 19... Sample holder setting table 21... Sample holder

Claims (1)

[Scope of Claims] A radiation measuring device that emits radiation from a radiation source and detects and measures reflected radiation from an object to be measured held by a holding means of a goniometer section, comprising: 1. A radiation measuring device comprising a tilting means for tilting the holding means to a position where the radiation is incident on the detection means without being influenced by the object to be measured.