CN217404186U - X-ray fluorescence spectrometer - Google Patents

Abstract

The application provides an X-ray fluorescence spectrometer, which comprises an adjustable detector device, an adjustable X-ray source device and an adjustable sample device which are horizontally arranged and mutually independent, wherein the adjustable detector device comprises a detector, a first position coarse adjusting component and a first position fine adjusting component, wherein the first position coarse adjusting component and the first position fine adjusting component are arranged below the detector; the adjustable X-ray source device comprises an X-ray source and a second position fine adjustment component fixedly provided with the X-ray source; the adjustable sample device comprises a sample support for fixing a sample and a third position fine adjustment component, wherein the sample support can slide relative to the third position fine adjustment component; the first, second and third position fine adjustment components can be adjusted in multiple freedom directions. The method and the device have the advantages that the adjusting efficiency and the adjusting precision are effectively considered, and therefore the accuracy and the detecting efficiency of the detection and analysis result are effectively improved. Meanwhile, the application can detect samples in various forms, and the application range is wider. In addition, the beryllium window of the detector can be effectively prevented from being polluted by a sample to be detected.

Description

X-ray fluorescence spectrometer

Technical Field

The application relates to the field of X-ray fluorescence spectrum equipment, in particular to an X-ray fluorescence spectrometer.

Background

An X-ray fluorescence spectrometer (XRF) consists of an excitation source (typically an X-ray source) and a detection system. The X-ray source generates incident X-rays to excite a sample to be detected to generate X-fluorescence (secondary X-rays), and the detector detects the X-fluorescence. Most of the existing X-ray fluorescence spectrometers are vertical three-dimensional structures, as shown in figure 1, a detector 1 and an X-ray source 2 are fixed at the lower end at a certain angle, the detector and the X-ray source are separated from a sample placement area 3 to be tested by a special Mylar film for X-ray fluorescence spectrum testing, the sample to be tested is placed at the upper end of the Mylar film, and the sample to be tested is directly tested. The distance and angle of the source-sample-probe (X-ray source-sample-detector) of the existing X-ray fluorescence spectrometer are fixed when the X-ray fluorescence spectrometer is shipped.

The distance and angle of the source-sample-probe of the existing X-ray fluorescence spectrometer are fixed, a user cannot change and adjust the X-ray fluorescence spectrometer, and because the optimal effect spectrograms corresponding to different types or forms of samples to be detected are different, the spectral spectrogram acquired by the existing X-ray fluorescence spectrometer may not be the optimal effect spectrogram, so that the calculated content of the sample elements has larger deviation from the actual content, and the problem of low detection accuracy is caused. In addition, the existing X-ray fluorescence spectrometer has high requirements on the sample to be measured, the sample to be measured needs to be placed in a special X-ray fluorescence sample cup and must be tightly packaged, which not only has strict limitations on the form, size and the like of the sample to be measured, but also can cause pollution of an X-ray source or damage of a beryllium window if the packaging is not tight, so that the X-ray fluorescence spectrometer cannot be used continuously.

Generally speaking, the main parameters for judging the detection effect of the X-ray fluorescence spectrometer are the counting rate and the peak-to-back ratio, and the larger the counting rate and the peak-to-back ratio are, the better the detection effect is. The counting rate and the peak-to-back ratio are mainly influenced by the distance and the angle of the source-sample-probe, so that the acquisition of the optimal detection position by adjusting the distance and the angle of the source-sample-probe is important and critical.

Disclosure of Invention

The X-ray fluorescence spectrometer is high in detection efficiency and accuracy and cannot damage an X-ray source and a beryllium window.

In order to achieve the purpose of the invention, the following technical scheme is adopted in the application:

an X-ray fluorescence spectrometer comprises adjustable detector devices, an adjustable X-ray source device and an adjustable sample device which are horizontally arranged and are mutually independent, wherein each adjustable detector device comprises a detector, a first position coarse adjustment component and a first position fine adjustment component, the first position coarse adjustment component and the first position fine adjustment component are arranged below the detector, the first position coarse adjustment component is used for coarsely adjusting the position of the detector, and the first position fine adjustment component can control circumferential rotation of the detector and distance adjustment in at least three freedom directions;

the adjustable X-ray source device comprises an X-ray source and a second position fine adjustment component fixedly installed on the X-ray source, and the second position fine adjustment component can control the axial rotation of the X-ray source and the distance adjustment in the directions of at least three degrees of freedom;

the adjustable sample device comprises a sample support for fixing a sample and a third position fine adjustment component, wherein the sample support can slide relative to the third position fine adjustment component, and the third position fine adjustment component can control the distance adjustment of the sample in at least three freedom directions.

Therefore, the X-ray fluorescence spectrometer can not only adjust the distance and the angle of the detector, the X-ray source and the sample to be detected with multiple degrees of freedom, but also combine coarse adjustment and fine adjustment, and can effectively take the adjustment efficiency and the adjustment precision into consideration, thereby effectively improving the accuracy of the detection and analysis result.

Preferably, the first position coarse adjustment member is provided with a plurality of first elongated sliding grooves, and the detector can move within a range defined by the plurality of elongated sliding grooves. The position of the detector is coarsely adjusted in a sliding mode in the sliding groove, so that the adjustment is quicker and more efficient.

Preferably, the first position coarse adjustment component is a plate-shaped bracket, the plate-shaped bracket is fixedly mounted on the first position fine adjustment component, and the bottom of the detector is provided with a plurality of first sliding buttons matched with the first elongated sliding grooves. The first position coarse adjustment component adopts a plate-shaped support structure, so that the structure is simple, the cost is low, and the operation is convenient.

Preferably, the sample holder is provided with a plurality of second elongated sliding grooves, and the sample can move within a range defined by the plurality of second elongated sliding grooves.

Preferably, the sample support comprises at least two layers, the sample support comprises a sample fixing part positioned on the upper layer and a connecting part positioned on the lower layer, a plurality of second elongated sliding grooves are formed in the connecting part, and a second sliding button matched with the second elongated sliding grooves is arranged at the top of the third position fine adjustment component. The sample support is simple in structure and low in cost, can be applied to samples to be detected in various forms, including solid samples such as ores, slurry samples, particles or powder samples and the like, and cannot damage detectors and beryllium windows.

Preferably, the first fine position adjustment component includes a first lifting table and a first rotating table fixedly connected to each other, the first lifting table can control the detector to perform position movement along the X-axis direction, the Y-axis direction and/or the Z-axis direction, and the first rotating table can control circumferential rotation of the detector to adjust a detection angle of the detector.

Preferably, the second fine position adjustment component comprises a second lifting table and a second rotating table which are fixedly connected with each other, the second lifting table can control the X-ray source to move along the X-axis direction, the Y-axis direction and/or the Z-axis direction, and the second rotating table can control the circumferential rotation of the X-ray source to adjust the ray emission angle of the X-ray source.

Preferably, the third position fine adjustment component is a third lifting platform, and the third lifting platform can control the sample support to move along the X-axis direction, the Y-axis direction and/or the Z-axis direction.

Preferably, the first rotating table and the second rotating table can both realize 360 ° angular rotation.

Preferably, the sample may be a solid sample, a slurry sample or a powder sample.

The application has the following beneficial effects: the detector device, the X-ray source device and the sample device of the X-ray fluorescence spectrometer are independent from each other and can be independently adjusted. The method further adopts a mode of combining coarse adjustment and fine adjustment, and adjustment efficiency and accuracy are both considered. This application can carry out the X axial to detector and X ray source respectively, Y axial and/or Z axial's removal, and circumferential direction is rotatory, carry out the X axial to the sample that awaits measuring, Y axial and/or Z axial's removal, it is visible that this application can realize multi freedom's adjustment simultaneously, make this application more nimble to the position control of each major component, it is convenient, can adjust the device to the best detection position comparatively high-efficiently, can guarantee to reach best detection effect, and then guarantee the accuracy of each element content in the sample that awaits measuring that acquires, and can be used to the exploration of the sample of multiple different forms, like solid sample, thick liquid attitude sample and powdered sample etc.. Because the X-ray fluorescence spectrometer is of a horizontal structure, the problem that the beryllium window is damaged by an X-ray source and/or a detector due to the fact that a sample to be detected is not tightly sealed is effectively solved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application. In the drawings:

FIG. 1 is a schematic diagram of a prior art product configuration;

FIG. 2 is a top view of an overall schematic structure of an embodiment of the present application;

FIG. 3 is a perspective view of the overall structure of an embodiment of the present application;

FIG. 4 is a schematic diagram of an alternative configuration of a first coarse position adjustment component according to an embodiment of the present disclosure;

FIG. 5 is a schematic view of an alternative construction of a sample holder according to an embodiment of the present application;

FIG. 6 is a schematic view of an alternative structure of an elevating platform in an embodiment of the present application;

FIG. 7 is a schematic view of an alternative structure of a turntable according to an embodiment of the present application;

FIG. 8 is a schematic view of an alternative configuration of a combination of a lift table and a rotary table according to an embodiment of the present application;

fig. 9 is a schematic optical path diagram of an embodiment of the present application in operation.

Wherein the reference numerals are as follows:

an adjustable detector arrangement 100; a detector 101; a first slide button 1011; a plate-like holder 102; a first elongated sliding groove 1021; a first lifting table 103; an X-direction knob 1031; a Y-direction knob 1032; a Z-direction knob 1033; a first rotating table 104; a coarse adjustment mechanism 1041; a fine adjustment mechanism 1042; a dial 1043; an adjustable X-ray source device 200; an X-ray source 201; a second lift table 202; a second rotating table 203; an adjustable sample device 300; a sample holder 301; a third lift stage 302; a second slide button 3021; a second elongated sliding groove 3013; a sample fixing section 3011; a connecting portion 3012; a sample placement port 3014.

Detailed Description

The following description of the embodiments of the present application is provided for illustrative purposes, and other advantages and capabilities of the present application will become apparent to those skilled in the art from the present disclosure.

It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for understanding and reading the contents disclosed in the specification, and are not used for limiting the conditions that the present application can implement, so the present invention has no technical significance, and any structural modification, ratio relationship change or size adjustment should still fall within the scope of the technical content disclosed in the present application without affecting the efficacy and the achievable purpose of the present application.

The technical solutions provided by the embodiments of the present application are described in detail below with reference to the accompanying drawings.

As shown in fig. 2 and fig. 3, an X-ray fluorescence spectrometer according to the present invention includes an adjustable detector device 100, an adjustable X-ray source device 200, and an adjustable sample device 300, wherein the adjustable detector device 100 and the adjustable X-ray source device 200 are arranged side by side, the adjustable sample device 300 is located opposite to the adjustable detector device 100 and the adjustable X-ray source device 200, and the adjustable detector device 100 and the adjustable X-ray source device 200 are horizontally arranged. The adjustable detector device 100, the adjustable X-ray source device 200 and the adjustable sample device 300 are independent of each other and can be adjusted independently, so that adjustment of all parts is not interfered with each other, and adjustment is more convenient.

The adjustable detector device 100 includes a detector 101 and an adjusting mechanism, and the detector 101 may be an existing detector as long as the requirements of the present application can be met. The adjustment mechanism of the adjustable detector apparatus 100 includes a first position coarse adjustment component and a first position fine adjustment component mounted below the detector 101. As shown in fig. 3, the first position coarse adjustment component may be configured as a plate-shaped support 102, a plurality of first elongated sliding grooves 1021 are formed in the plate-shaped support 102, a first sliding button 1011 matching with the first elongated sliding grooves 1021 is installed at the bottom of the detector 101, and the detector 101 moves back and forth in the first elongated sliding grooves 1021 through the first sliding button 1011, so as to implement coarse adjustment of the position of the detector 101, and perform fine adjustment based on the coarse adjustment, which is more efficient. In other embodiments, the first position coarse adjustment component may have other configurations, and the direction of coarse adjustment is not limited to moving back and forth.

The first position fine adjustment means includes a first elevating table 103 and a first rotating table 104, the first rotating table 104 is fixedly mounted on the first elevating table 103, and the plate bracket 102 is fixedly mounted on the first rotating table 104. The first rotating table 104 can rotate 360 degrees, so that the detection angle of the detector 101 can be adjusted by rotating the first rotating table 104, the specific structure of the first rotating table 104 is not limited, for example, a rotating table with a coarse adjustment mechanism 1061 and a fine adjustment mechanism 1062 as shown in fig. 7 can be selected, and a dial 1063 is further provided, so that the rotated angle can be clearly known through the dial 1063 during adjustment, and the adjustment is more precise and precise. The first lifting table 103 is disposed on the operating table, the first lifting table 103 is provided with an X-axis moving mechanism, an X-direction knob 1031, a Y-axis moving mechanism, a Y-direction knob 1032, a Z-axis moving mechanism and a Z-direction knob 1033, and an operator adjusts the movement of the first lifting table 103 by rotating the corresponding knob according to a required adjusting direction and distance, so as to drive components mounted thereon to move correspondingly, and thus the first lifting table 103 can move the detector 101 along the X-axis direction, the Y-axis direction and/or the Z-axis direction. The specific structure of the first lifting platform 103 is not limited, and the lifting platform shown in fig. 6 can be used. In this embodiment, the first rotating table 104 and the first elevating table 103 may be a combined structure as shown in fig. 8, and by this combined structure, the position of the detector 101 may be moved in the X-axis direction, the Y-axis direction, and/or the Z-axis direction, and the detection angle may be adjusted. In other embodiments, the first rotating stage 104 and the first lifting stage 103 may be integrally formed structures, or may include more degrees of freedom of adjustment.

As shown in fig. 2 and 3, the adjustable X-ray source apparatus 200 includes an X-ray source 201 and a second position fine adjustment component for fixedly mounting the X-ray source, the second position fine adjustment component can be configured as a combination component of a second lifting table 201 and a second rotating table 202, the second rotating table 202 is fixedly mounted on the second lifting table 201, and the X-ray source 201 is fixedly mounted on the second rotating table 202. The second rotating stage 202 can drive the X-ray source 201 to circumferentially rotate by 360 degrees, and the second lifting stage 201 can move in the X-axis direction, the Y-axis direction and the Z-axis direction, so that the X-ray source 201 can be controlled to move in the X-axis direction, the Y-axis direction and/or the Z-axis direction by the second lifting stage 201. In other embodiments, more degrees of freedom of directional control may be added. In this embodiment, the second lift table 201 may be the same as the first lift table 103, and the second rotating table 202 may be the same as the first lift table 103.

As shown in fig. 2, 3, and 5, the adjustable sample assembly 300 includes a sample holder 301 for holding a sample and a third position fine adjustment component. In this embodiment, the third position fine adjustment component is selected as the third lifting stage 302, and the third lifting stage 302 can move in the X-axis direction, the Y-axis direction, and the Z-axis direction, so that the third lifting stage 302 can control the position of the sample to be measured to move in the X-axis direction, the Y-axis direction, and/or the Z-axis direction. In other embodiments, control in more degrees of freedom may also be added. In this embodiment, the third lifting platform 302 may be the same lifting platform as the first lifting platform 103. The sample holder 301 has a two-layer structure as shown in fig. 5, the upper layer is a sample fixing portion 3011, the lower layer is a connecting portion 3012, and the connecting portion 3012 is symmetrically provided with a plurality of second elongated sliding grooves 3013. The sample fixing portion 3011 is provided with a sample placing opening 3014, and can be used for placing a solid sample, a slurry sample, a liquid sample, and a powdery or granular sample, so that the form and the type of the sample which can be used for testing in the application can be increased, the requirement on the sealing performance of the sample is greatly reduced, and if the sample is leaked partially carelessly, the sample is not easy to damage a beryllium window of a detector. A second slide button 3021 matched with the second elongated sliding slot 3013 is disposed on the upper surface of the third lifting platform 302, and the second slide button 3021 can slide along the second elongated sliding slot 3013. During adjustment, an operator can push the sample holder 301, so that the sample holder 301 moves back and forth along the second elongated sliding slot 3013, thereby realizing coarse adjustment of the position of the sample to be measured. Then, the operator adjusts the third elevating platform 302 to move the sample to be measured along the X-axis, the Y-axis and/or the Z-axis.

The X-ray fluorescence spectrometer can quickly, conveniently and accurately adjust the distance and the angle of each part, so that the optimal detection position is obtained, and the accuracy of the content of each element in the obtained sample to be detected is further ensured. The schematic optical path diagram of the X-ray fluorescence spectrometer during operation is shown in fig. 9, and when the X-ray fluorescence spectrometer is used, an initial position can be set according to theoretical calculation or practical experience, for example, the initial position is set as: the distance between the detector 101 and the X-ray source 201 from the sample to be measured is H1-H2-1 cm, the incident angle α -45 °, and the exit angle β -45 °. And then adjusting the distance and the angle among the detector 101, the X-ray source 201 and the sample to be detected as required until the optimal detection position is reached.

Therefore, the X-ray fluorescence spectrometer can not only adjust the distance and the angle of the detector, the X-ray source and the sample to be detected with multiple degrees of freedom, but also combine coarse adjustment and fine adjustment, can quickly adjust the instrument to the optimal detection position, and effectively considers the adjustment efficiency and the adjustment precision, thereby effectively improving the accuracy and the detection efficiency of the detection and analysis result. Meanwhile, the application can detect samples in various forms, and the application range is wider. In addition, the beryllium window of the detector can be effectively prevented from being polluted by a sample to be detected.

It should be noted that in the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "X-axis", "Y-axis", "Z-axis", "axial", "radial", etc. indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present application. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate a number of the indicated technical features. Thus, features defined as "first", "second", "third" may explicitly or implicitly include one or more of the features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise. In this application, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral forms; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the application can be understood by those of ordinary skill in the art as appropriate.

The embodiments of the present application have been described in detail, but the description is only for the preferred embodiments of the present application and should not be construed as limiting the scope of the application. All equivalent changes, modifications, substitutions and alterations should be made herein without departing from the spirit and scope of the present application.

Claims (10)

1. An X-ray fluorescence spectrometer comprises an adjustable detector device, an adjustable X-ray source device and an adjustable sample device which are horizontally arranged and mutually independent, wherein,

the adjustable detector device comprises a detector, a first position coarse adjustment component and a first position fine adjustment component, wherein the first position coarse adjustment component and the first position fine adjustment component are arranged below the detector, the first position coarse adjustment component is used for coarsely adjusting the position of the detector, and the first position fine adjustment component can control the circumferential rotation of the detector and the distance adjustment in at least three freedom degree directions;

the adjustable X-ray source device comprises an X-ray source and a second position fine adjustment component fixedly provided with the X-ray source, wherein the second position fine adjustment component can control the axial rotation of the X-ray source and the distance adjustment in at least three freedom degree directions;

the adjustable sample device comprises a sample support for fixing a sample and a third position fine adjustment component, wherein the sample support can slide relative to the third position fine adjustment component, and the third position fine adjustment component can control the distance adjustment of the sample in at least three freedom degrees.

2. The X-ray fluorescence spectrometer of claim 1, wherein the first coarse position adjustment member defines a plurality of first elongated sliding grooves, and the detector is movable within a range defined by the plurality of elongated sliding grooves.

3. The X-ray fluorescence spectrometer of claim 2, wherein the first coarse position adjustment member is a plate-shaped support, the plate-shaped support is fixedly mounted on the first fine position adjustment member, and a plurality of first slide buttons matched with the first elongated slide grooves are arranged at the bottom of the detector.

4. The X-ray fluorescence spectrometer of claim 1, wherein the sample holder defines a plurality of second elongated sliding slots, and the sample is movable within a range defined by the plurality of second elongated sliding slots.

5. The X-ray fluorescence spectrometer according to claim 4, wherein the sample holder comprises at least two layers, including a sample fixing portion located on an upper layer and a connecting portion located on a lower layer, the connecting portion has a plurality of second elongated sliding grooves, and a second slide button is disposed on the top of the third position fine adjustment member and is engaged with the plurality of second elongated sliding grooves.

6. The X-ray fluorescence spectrometer of claim 1, wherein the first fine position adjustment component comprises a first elevating stage and a first rotating stage fixedly connected to each other, the first elevating stage can control the detector to perform position movement along the X-axis direction, the Y-axis direction and/or the Z-axis direction, and the first rotating stage can control the circumferential rotation of the detector to adjust the detection angle of the detector.

7. The X-ray fluorescence spectrometer of claim 6, wherein the second fine position adjustment component comprises a second elevating stage and a second rotating stage fixedly connected to each other, the second elevating stage can control the X-ray source to move along the X-axis direction, the Y-axis direction and/or the Z-axis direction, and the second rotating stage can control the circumferential rotation of the X-ray source to adjust the ray emission angle of the X-ray source.

8. The X-ray fluorescence spectrometer of claim 1, wherein the third fine position adjustment component is a third stage that controls the sample holder to move in position along the X-axis, Y-axis, and/or Z-axis.

9. The X-ray fluorescence spectrometer of claim 7, wherein the first and second rotation stages are each capable of 360 ° angular rotation.

10. The X-ray fluorescence spectrometer of claim 1, wherein the sample is a solid sample, a slurry sample, or a powder sample.

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