JPH037949Y2 - - Google Patents

Info

Publication number
JPH037949Y2
JPH037949Y2 JP14238786U JP14238786U JPH037949Y2 JP H037949 Y2 JPH037949 Y2 JP H037949Y2 JP 14238786 U JP14238786 U JP 14238786U JP 14238786 U JP14238786 U JP 14238786U JP H037949 Y2 JPH037949 Y2 JP H037949Y2
Authority
JP
Japan
Prior art keywords
fixed cover
cover
semi
inert gas
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14238786U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6349235U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14238786U priority Critical patent/JPH037949Y2/ja
Publication of JPS6349235U publication Critical patent/JPS6349235U/ja
Application granted granted Critical
Publication of JPH037949Y2 publication Critical patent/JPH037949Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
JP14238786U 1986-09-17 1986-09-17 Expired JPH037949Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14238786U JPH037949Y2 (enrdf_load_stackoverflow) 1986-09-17 1986-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14238786U JPH037949Y2 (enrdf_load_stackoverflow) 1986-09-17 1986-09-17

Publications (2)

Publication Number Publication Date
JPS6349235U JPS6349235U (enrdf_load_stackoverflow) 1988-04-04
JPH037949Y2 true JPH037949Y2 (enrdf_load_stackoverflow) 1991-02-27

Family

ID=31051077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14238786U Expired JPH037949Y2 (enrdf_load_stackoverflow) 1986-09-17 1986-09-17

Country Status (1)

Country Link
JP (1) JPH037949Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6349235U (enrdf_load_stackoverflow) 1988-04-04

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