JPH0375083B2 - - Google Patents

Info

Publication number
JPH0375083B2
JPH0375083B2 JP9822787A JP9822787A JPH0375083B2 JP H0375083 B2 JPH0375083 B2 JP H0375083B2 JP 9822787 A JP9822787 A JP 9822787A JP 9822787 A JP9822787 A JP 9822787A JP H0375083 B2 JPH0375083 B2 JP H0375083B2
Authority
JP
Japan
Prior art keywords
circuit
matching
load
branch
matching device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9822787A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63264892A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9822787A priority Critical patent/JPS63264892A/ja
Publication of JPS63264892A publication Critical patent/JPS63264892A/ja
Publication of JPH0375083B2 publication Critical patent/JPH0375083B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of High-Frequency Heating Circuits (AREA)
  • Constitution Of High-Frequency Heating (AREA)
  • Drying Of Semiconductors (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
JP9822787A 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路 Granted JPS63264892A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9822787A JPS63264892A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9822787A JPS63264892A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Publications (2)

Publication Number Publication Date
JPS63264892A JPS63264892A (ja) 1988-11-01
JPH0375083B2 true JPH0375083B2 (enExample) 1991-11-29

Family

ID=14214072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9822787A Granted JPS63264892A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Country Status (1)

Country Link
JP (1) JPS63264892A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6438252B2 (ja) * 2014-09-22 2018-12-12 株式会社日立国際電気 整合器および整合方法

Also Published As

Publication number Publication date
JPS63264892A (ja) 1988-11-01

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Legal Events

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R250 Receipt of annual fees

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R250 Receipt of annual fees

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LAPS Cancellation because of no payment of annual fees