JPH0375083B2 - - Google Patents

Info

Publication number
JPH0375083B2
JPH0375083B2 JP9822787A JP9822787A JPH0375083B2 JP H0375083 B2 JPH0375083 B2 JP H0375083B2 JP 9822787 A JP9822787 A JP 9822787A JP 9822787 A JP9822787 A JP 9822787A JP H0375083 B2 JPH0375083 B2 JP H0375083B2
Authority
JP
Japan
Prior art keywords
circuit
matching
load
branch
matching device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9822787A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63264892A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9822787A priority Critical patent/JPS63264892A/ja
Publication of JPS63264892A publication Critical patent/JPS63264892A/ja
Publication of JPH0375083B2 publication Critical patent/JPH0375083B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
  • Control Of High-Frequency Heating Circuits (AREA)
  • Constitution Of High-Frequency Heating (AREA)
  • Drying Of Semiconductors (AREA)
JP9822787A 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路 Granted JPS63264892A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9822787A JPS63264892A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9822787A JPS63264892A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Publications (2)

Publication Number Publication Date
JPS63264892A JPS63264892A (ja) 1988-11-01
JPH0375083B2 true JPH0375083B2 (enExample) 1991-11-29

Family

ID=14214072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9822787A Granted JPS63264892A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Country Status (1)

Country Link
JP (1) JPS63264892A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6438252B2 (ja) * 2014-09-22 2018-12-12 株式会社日立国際電気 整合器および整合方法

Also Published As

Publication number Publication date
JPS63264892A (ja) 1988-11-01

Similar Documents

Publication Publication Date Title
US3919644A (en) Automatic antenna coupler utilizing system for measuring the real part of the complex impedance or admittance presented by an antenna or other network
JPH0358513A (ja) 整合回路網の自動調整回路
JP2929284B2 (ja) 高周波プラズマ処理装置のためのインピーダンス整合及び電力制御システム
US7151382B1 (en) Apparatus and method for radio frequency power and standing wave ratio measurement
EP0752757A1 (en) Rf match detector circuit with dual directional coupler
JP3183914B2 (ja) インピーダンス自動整合装置
US4485360A (en) Apparatus for and method of impedance matching
CA2341941A1 (en) Method and apparatus for measuring harmonic load-pull for frequency multiplication
JPH0375083B2 (enExample)
JPH0793525B2 (ja) 多素子整合器を使用するマイクロ波自動負荷整合回路
US3624536A (en) High-dynamic-range amplifier
JP3021093B2 (ja) プラズマインピーダンス測定装置
JPH0375084B2 (enExample)
JPS6226158B2 (enExample)
US4311972A (en) High speed antenna coupler
JPS6315502A (ja) マイクロ波自動負荷整合回路
JP2981284B2 (ja) マイクロ波発振器用電源装置
JP2685003B2 (ja) 電力合成器
JPS61139111A (ja) 高周波スパツタリング装置等の自動負荷整合回路
JPS61274427A (ja) 自動整合方式
US2691123A (en) Sensitivity control for follow-up type of computer apparatus
JP3375591B2 (ja) 自動整合装置
JPS63248225A (ja) 自動同調装置
JP2005286853A (ja) インピーダンス自動整合方法、これを有するインピーダンス整合器、及びインピーダンス整合回路を内蔵する高周波発生器もしくは受信機
JP7286030B2 (ja) 振幅位相検波回路

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees