JPS63264892A - Ｅ／ｈ整合器を使用する自動負荷整合回路 - Google Patents

Ｅ／ｈ整合器を使用する自動負荷整合回路

Info

Publication number
JPS63264892A
JPS63264892A JP9822787A JP9822787A JPS63264892A JP S63264892 A JPS63264892 A JP S63264892A JP 9822787 A JP9822787 A JP 9822787A JP 9822787 A JP9822787 A JP 9822787A JP S63264892 A JPS63264892 A JP S63264892A
Authority
JP
Japan
Prior art keywords
circuit
load
matching
gamma
branch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9822787A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0375083B2 (enExample
Inventor
Kibatsu Shinohara
己抜 篠原
Hiroshi Hasunuma
蓮沼　博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Koshuha Co Ltd
Original Assignee
Nihon Koshuha Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Koshuha Co Ltd filed Critical Nihon Koshuha Co Ltd
Priority to JP9822787A priority Critical patent/JPS63264892A/ja
Publication of JPS63264892A publication Critical patent/JPS63264892A/ja
Publication of JPH0375083B2 publication Critical patent/JPH0375083B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
  • Control Of High-Frequency Heating Circuits (AREA)
  • Constitution Of High-Frequency Heating (AREA)
  • Drying Of Semiconductors (AREA)
JP9822787A 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路 Granted JPS63264892A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9822787A JPS63264892A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9822787A JPS63264892A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Publications (2)

Publication Number Publication Date
JPS63264892A true JPS63264892A (ja) 1988-11-01
JPH0375083B2 JPH0375083B2 (enExample) 1991-11-29

Family

ID=14214072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9822787A Granted JPS63264892A (ja) 1987-04-21 1987-04-21 Ｅ／ｈ整合器を使用する自動負荷整合回路

Country Status (1)

Country Link
JP (1) JPS63264892A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016063518A (ja) * 2014-09-22 2016-04-25 株式会社日立国際電気 整合器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016063518A (ja) * 2014-09-22 2016-04-25 株式会社日立国際電気 整合器

Also Published As

Publication number Publication date
JPH0375083B2 (enExample) 1991-11-29

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