JPH0375084B2 - - Google Patents
Info
- Publication number
- JPH0375084B2 JPH0375084B2 JP9822887A JP9822887A JPH0375084B2 JP H0375084 B2 JPH0375084 B2 JP H0375084B2 JP 9822887 A JP9822887 A JP 9822887A JP 9822887 A JP9822887 A JP 9822887A JP H0375084 B2 JPH0375084 B2 JP H0375084B2
- Authority
- JP
- Japan
- Prior art keywords
- circuit
- matching
- load
- branch
- matching device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 4
- 239000002131 composite material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Measurement Of Resistance Or Impedance (AREA)
- Control Of High-Frequency Heating Circuits (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9822887A JPS63264893A (ja) | 1987-04-21 | 1987-04-21 | Ｅ／ｈ整合器を使用する自動負荷整合回路 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9822887A JPS63264893A (ja) | 1987-04-21 | 1987-04-21 | Ｅ／ｈ整合器を使用する自動負荷整合回路 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63264893A JPS63264893A (ja) | 1988-11-01 |
| JPH0375084B2 true JPH0375084B2 (enExample) | 1991-11-29 |
Family
ID=14214101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9822887A Granted JPS63264893A (ja) | 1987-04-21 | 1987-04-21 | Ｅ／ｈ整合器を使用する自動負荷整合回路 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63264893A (enExample) |
-
1987
- 1987-04-21 JP JP9822887A patent/JPS63264893A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63264893A (ja) | 1988-11-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |