JPH037477B2 - - Google Patents

Info

Publication number
JPH037477B2
JPH037477B2 JP60095903A JP9590385A JPH037477B2 JP H037477 B2 JPH037477 B2 JP H037477B2 JP 60095903 A JP60095903 A JP 60095903A JP 9590385 A JP9590385 A JP 9590385A JP H037477 B2 JPH037477 B2 JP H037477B2
Authority
JP
Japan
Prior art keywords
laser beam
laser
optical path
attenuator
shielding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60095903A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60247488A (ja
Inventor
Soichi Oomori
Shigetomi Fukuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60095903A priority Critical patent/JPS60247488A/ja
Publication of JPS60247488A publication Critical patent/JPS60247488A/ja
Publication of JPH037477B2 publication Critical patent/JPH037477B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Processing (AREA)
  • Lasers (AREA)
  • Optical Elements Other Than Lenses (AREA)
JP60095903A 1985-05-08 1985-05-08 レーザ装置 Granted JPS60247488A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60095903A JPS60247488A (ja) 1985-05-08 1985-05-08 レーザ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60095903A JPS60247488A (ja) 1985-05-08 1985-05-08 レーザ装置

Publications (2)

Publication Number Publication Date
JPS60247488A JPS60247488A (ja) 1985-12-07
JPH037477B2 true JPH037477B2 (enrdf_load_stackoverflow) 1991-02-01

Family

ID=14150251

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60095903A Granted JPS60247488A (ja) 1985-05-08 1985-05-08 レーザ装置

Country Status (1)

Country Link
JP (1) JPS60247488A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6333186A (ja) * 1986-07-29 1988-02-12 Fujita Corp レ−ザ−光線照射ビ−ムの安全装置
JP2672324B2 (ja) * 1988-03-29 1997-11-05 ファナック株式会社 レーザ装置
US4927226A (en) * 1989-03-27 1990-05-22 General Electric Company Multiplexer for high power CW lasers
US5596590A (en) * 1996-01-25 1997-01-21 Cymer Laser Technologies Beam diverting shutter for a laser beam
KR100916656B1 (ko) * 2002-10-22 2009-09-08 삼성전자주식회사 레이저 조사 장치 및 이를 이용한 다결정 규소 박막트랜지스터의 제조 방법
JP3845650B1 (ja) * 2005-06-13 2006-11-15 株式会社日本製鋼所 レーザ照射方法及びその装置
JP5146436B2 (ja) * 2009-10-06 2013-02-20 三菱電機株式会社 レーザ光吸収装置及びその固体レーザ装置
JPWO2015052744A1 (ja) * 2013-10-11 2017-03-09 三菱電機株式会社 レーザ装置
CN111208643A (zh) * 2020-01-21 2020-05-29 武汉锐科光纤激光技术股份有限公司 高功率激光衰减器

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5260995U (enrdf_load_stackoverflow) * 1975-10-30 1977-05-04

Also Published As

Publication number Publication date
JPS60247488A (ja) 1985-12-07

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