JPH037405Y2 - - Google Patents

Info

Publication number
JPH037405Y2
JPH037405Y2 JP1985032474U JP3247485U JPH037405Y2 JP H037405 Y2 JPH037405 Y2 JP H037405Y2 JP 1985032474 U JP1985032474 U JP 1985032474U JP 3247485 U JP3247485 U JP 3247485U JP H037405 Y2 JPH037405 Y2 JP H037405Y2
Authority
JP
Japan
Prior art keywords
crucible
melt
single crystal
heater
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985032474U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61150862U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985032474U priority Critical patent/JPH037405Y2/ja
Publication of JPS61150862U publication Critical patent/JPS61150862U/ja
Application granted granted Critical
Publication of JPH037405Y2 publication Critical patent/JPH037405Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1985032474U 1985-03-06 1985-03-06 Expired JPH037405Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985032474U JPH037405Y2 (enrdf_load_html_response) 1985-03-06 1985-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985032474U JPH037405Y2 (enrdf_load_html_response) 1985-03-06 1985-03-06

Publications (2)

Publication Number Publication Date
JPS61150862U JPS61150862U (enrdf_load_html_response) 1986-09-18
JPH037405Y2 true JPH037405Y2 (enrdf_load_html_response) 1991-02-25

Family

ID=30534020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985032474U Expired JPH037405Y2 (enrdf_load_html_response) 1985-03-06 1985-03-06

Country Status (1)

Country Link
JP (1) JPH037405Y2 (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2539336Y2 (ja) * 1990-03-15 1997-06-25 住友金属工業株式会社 結晶成長装置
JP2606046B2 (ja) * 1992-04-16 1997-04-30 住友金属工業株式会社 単結晶引き上げ時における単結晶酸素濃度の制御方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113664Y2 (enrdf_load_html_response) * 1971-09-16 1976-04-12
JPS5345679A (en) * 1976-10-08 1978-04-24 Hitachi Ltd Pulling-up apparatus for sillicon single crystal
JPS55126597A (en) * 1979-03-23 1980-09-30 Nec Corp Single crystal growing method

Also Published As

Publication number Publication date
JPS61150862U (enrdf_load_html_response) 1986-09-18

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