JPH0371731B2 - - Google Patents
Info
- Publication number
- JPH0371731B2 JPH0371731B2 JP22544685A JP22544685A JPH0371731B2 JP H0371731 B2 JPH0371731 B2 JP H0371731B2 JP 22544685 A JP22544685 A JP 22544685A JP 22544685 A JP22544685 A JP 22544685A JP H0371731 B2 JPH0371731 B2 JP H0371731B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- insulating film
- manufacturing
- switch
- electrode layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 53
- 239000000758 substrate Substances 0.000 claims description 13
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000011247 coating layer Substances 0.000 claims description 7
- 230000005291 magnetic effect Effects 0.000 claims description 7
- 238000010030 laminating Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 1
- 230000005294 ferromagnetic effect Effects 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- UCHOFYCGAZVYGZ-UHFFFAOYSA-N gold lead Chemical compound [Au].[Pb] UCHOFYCGAZVYGZ-UHFFFAOYSA-N 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Electronic Switches (AREA)
- Manufacture Of Switches (AREA)
- Switches That Are Operated By Magnetic Or Electric Fields (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
- Push-Button Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22544685A JPS6188417A (ja) | 1985-10-08 | 1985-10-08 | 無接点スイッチの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22544685A JPS6188417A (ja) | 1985-10-08 | 1985-10-08 | 無接点スイッチの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6188417A JPS6188417A (ja) | 1986-05-06 |
| JPH0371731B2 true JPH0371731B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-11-14 |
Family
ID=16829483
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22544685A Granted JPS6188417A (ja) | 1985-10-08 | 1985-10-08 | 無接点スイッチの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6188417A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0602538B1 (fr) * | 1992-12-15 | 1997-06-04 | Asulab S.A. | Contacteur "reed" et procédé de fabrication de microstructures métalliques tridimensionnelles suspendues |
-
1985
- 1985-10-08 JP JP22544685A patent/JPS6188417A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6188417A (ja) | 1986-05-06 |
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