JPH0371548U - - Google Patents
Info
- Publication number
- JPH0371548U JPH0371548U JP13209889U JP13209889U JPH0371548U JP H0371548 U JPH0371548 U JP H0371548U JP 13209889 U JP13209889 U JP 13209889U JP 13209889 U JP13209889 U JP 13209889U JP H0371548 U JPH0371548 U JP H0371548U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- groove
- spring
- sample
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本案の実施例で、試料観察時と同一の
真上から見た図、第２図は第１図を輪切にした断
面図、第３図は第１図の応用で真上から見た図で
ある。
１……ホールダ軸、２……試料、３……溝、４
……段面、５……穴、６……保持体、７……板バ
ネ、８……調整軸、９……保持体、１０……コイ
ルバネ。
Figure 1 is an example of the present invention, viewed from directly above, the same as when observing the sample, Figure 2 is a cross-sectional view of Figure 1, and Figure 3 is an application of Figure 1, viewed from directly above. This is a diagram seen from. 1... Holder shaft, 2... Sample, 3... Groove, 4
... Step surface, 5 ... Hole, 6 ... Holder, 7 ... Leaf spring, 8 ... Adjustment shaft, 9 ... Holder, 10 ... Coil spring.
Claims (1)
の、試料ホールダ先端端部に試料搭載の溝を有し
た試料断面ホールダにおいて、溝内に保持体を設
けて、この保持体と片側の溝壁との間に、バネを
挟み込み、さらにバネ側より調整軸を保持体にね
じ込みホールダ軸に支持したことを特徴とする電
子顕微鏡用バルク試料断面ホールダ。 ２ 請求項の範囲第１項において、前記溝内に２
個の保持体をホールダ軸方向の前後に互いに違い
に設けて、溝壁と保持体との両方の間にバネを挟
み込み、各々のバネ側から調整軸を保持体にねじ
込んで、ホールダ軸に支持したことを特徴とする
電子顕微鏡用バルク試料断面ホールダ。 ３ 請求項の範囲第１項または第２項において、
前記保持体は少なくとも溝壁と平行面を有し、か
つ、該平行面と直角方向にネジ穴を設け、溝端面
と保持体とがネジ穴と同一方向に密接するよう構
成したことを特徴とする電子顕微鏡用バルク試料
断面ホールダ。[Scope of Claim for Utility Model Registration] 1. In a sample cross-section holder of a side-entry sample stage for an electron microscope, which has a groove for mounting the sample at the tip end of the sample holder, a holder is provided in the groove, and this holder and one side 1. A bulk sample cross section holder for an electron microscope, characterized in that a spring is sandwiched between the groove wall and the spring side, and an adjustment shaft is screwed into the holder from the spring side and supported by the holder shaft. 2. In the scope of claim 1, 2.
Holders are provided at different positions in the front and rear of the holder axis, a spring is sandwiched between both the groove wall and the holder, and the adjustment shaft is screwed into the holder from each spring side and supported by the holder shaft. A bulk sample cross-section holder for electron microscopes, which is characterized by: 3 In the scope of the claim, paragraph 1 or 2,
The holder has at least a surface parallel to the groove wall, and a screw hole is provided in a direction perpendicular to the parallel surface, so that the groove end surface and the holder are in close contact with each other in the same direction as the screw hole. Bulk sample cross section holder for electron microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13209889U JPH0371548U (en) | 1989-11-15 | 1989-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13209889U JPH0371548U (en) | 1989-11-15 | 1989-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0371548U true JPH0371548U (en) | 1991-07-19 |
Family
ID=31679571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13209889U Pending JPH0371548U (en) | 1989-11-15 | 1989-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0371548U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010056078A (en) * | 2008-07-28 | 2010-03-11 | Hitachi High-Technologies Corp | Sample holder for charged particle beam device |
-
1989
- 1989-11-15 JP JP13209889U patent/JPH0371548U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010056078A (en) * | 2008-07-28 | 2010-03-11 | Hitachi High-Technologies Corp | Sample holder for charged particle beam device |
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