JPS60130557U

JPS60130557U - Ion source acceleration slit adjustment device

Info

Publication number: JPS60130557U
Application number: JP1849584U
Authority: JP
Inventors: 清水　昌男
Original assignee: 日本電子株式会社
Priority date: 1984-02-10
Filing date: 1984-02-10
Publication date: 1985-09-02

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図はスパークイオン源質量分析装置の原理図、第２
図は従来のスパークイオン源の断面図、第３図はこの考
案の一実施例によるスパークイオン源の断面図、第４図
はその一部の分解斜視図である。各図中、同一符号は同一または相当部分を示し、１はイ
オン源、２は試料電極、３は加速スリット、４はイオン
ビーム、５は主スリット、９はベース、１ｏｃｉカバー
、１１はホルダ、１６，２６．３３はスプリング、２２
は操作機構、２３はガイド、２５はフランジ、２９９　
３６ａはロッド、３０はインシュレータ、３１はプレー
ト、３２はスリーブ、３４はシリンダ、３−６はマイク
ロメータである。Figure 1 is a diagram of the principle of the spark ion source mass spectrometer, Figure 2
FIG. 3 is a sectional view of a conventional spark ion source, FIG. 3 is a sectional view of a spark ion source according to an embodiment of the present invention, and FIG. 4 is an exploded perspective view of a portion thereof. In each figure, the same reference numerals indicate the same or equivalent parts, 1 is the ion source, 2 is the sample electrode, 3 is the acceleration slit, 4 is the ion beam, 5 is the main slit, 9 is the base, 1oci cover, 11 is the holder, 16, 26.33 is a spring, 22
is an operating mechanism, 23 is a guide, 25 is a flange, 299
36a is a rod, 30 is an insulator, 31 is a plate, 32 is a sleeve, 34 is a cylinder, and 3-6 is a micrometer.

Claims

[Scope of utility model registration request]

(1) A holder that attaches the acceleration slit to the ion source, a spring that biases the holder in one direction, and an operating mechanism inserted from the outside to push the holder in the opposite direction against the bias of the spring. and a spring that biases the operating mechanism that is engaged with the holster when the ion source chamber is in a vacuum state to release the engagement when the ion source chamber is at atmospheric pressure. Ion source acceleration slit adjustment device.

(2) The acceleration slit adjustment device for an ion source according to claim 1, wherein the operating mechanism operates the holder via an insulator.

(3) The operating mechanism includes a sleeve-shaped guide attached to the ion source chamber housing, a flange that slides within this guide, and a spring that presses this flange outward.
A rod that slides inside the flange, an insulator that is connected to this rod and extends inside the ion source chamber, a plate that is attached to the tip of this insulator and engages with the holder, and a screw attached to the outside end of the rod. A practical device consisting of a sleeve attached, a spring that presses the sleeve outward, a cylinder attached to the flange to cover the sleeve and spring, and a micrometer attached to the cylinder to press the rod. An acceleration slit adjustment device for an ion source as claimed in claim 1 or 2.