JPH0163060U - - Google Patents
Info
- Publication number
- JPH0163060U JPH0163060U JP1987157430U JP15743087U JPH0163060U JP H0163060 U JPH0163060 U JP H0163060U JP 1987157430 U JP1987157430 U JP 1987157430U JP 15743087 U JP15743087 U JP 15743087U JP H0163060 U JPH0163060 U JP H0163060U
- Authority
- JP
- Japan
- Prior art keywords
- objective lens
- sample chamber
- excitation
- varying
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 1
Description
第１図は本案の一実施例の対物レンズ部及び試
料室部の縦断面図である。
２…試料室、３…非磁性材スペーサー、４…対
物レンズ。
FIG. 1 is a longitudinal cross-sectional view of an objective lens section and a sample chamber section of an embodiment of the present invention. 2...Sample chamber, 3...Nonmagnetic material spacer, 4...Objective lens.
Claims (1)
ーカス合わせをする電子顕微鏡において、前記対
物レンズと該対物レンズ上部の試料室の間に磁気
抵抗を持たせる手段を有することを特徴とする電
子顕微鏡。 What is claimed is: 1. An electron microscope that performs focus adjustment by varying the excitation of an objective lens, comprising means for providing magnetic resistance between the objective lens and a sample chamber above the objective lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157430U JPH0163060U (en) | 1987-10-16 | 1987-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157430U JPH0163060U (en) | 1987-10-16 | 1987-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163060U true JPH0163060U (en) | 1989-04-24 |
Family
ID=31436865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987157430U Pending JPH0163060U (en) | 1987-10-16 | 1987-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163060U (en) |
-
1987
- 1987-10-16 JP JP1987157430U patent/JPH0163060U/ja active Pending