JPS61194950U - - Google Patents
Info
- Publication number
- JPS61194950U JPS61194950U JP7921085U JP7921085U JPS61194950U JP S61194950 U JPS61194950 U JP S61194950U JP 7921085 U JP7921085 U JP 7921085U JP 7921085 U JP7921085 U JP 7921085U JP S61194950 U JPS61194950 U JP S61194950U
- Authority
- JP
- Japan
- Prior art keywords
- holding rod
- specimen
- sample holding
- sample
- tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
Description
第１図は本考案の平面断面図である。
２…試料保持棒、８…試料保持棒受、９…球体
受部、１０…球体部、１１…テコ体、１４…Ｘコ
ントロール軸、１５…連結棒、１６…スプリング
、１７…掛具。
FIG. 1 is a plan sectional view of the present invention. 2... Sample holding rod, 8... Sample holding rod holder, 9... Ball receiver, 10... Ball part, 11... Lever body, 14... X control shaft, 15... Connecting rod, 16... Spring, 17... Hang.
Claims (1)
棒と、この試料保持棒をＸ軸方向に遠近移動させ
るテコ体及び連結棒で構成される遊動体を介在さ
せ、前記試料保持棒の先端と連結棒の先端を当接
し、Ｘコントロール螺子を回すことにより、圧力
差を利用して試料移動させる試料微動装置におい
て、前記試料保持棒に外力を与える手段を備えた
ことを特徴とする電子顕微鏡等の試料微動装置。 A sample holding rod inserted from the X-axis direction perpendicular to the optical axis, and a movable body consisting of a lever body and a connecting rod that move this sample holding rod near and far in the X-axis direction are interposed, and the tip of the sample holding rod and An electron microscope, etc., characterized in that the specimen fine movement device moves the specimen using a pressure difference by bringing the tip of a connecting rod into contact and turning an X-control screw, which is equipped with means for applying an external force to the specimen holding rod. sample fine movement device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7921085U JPS61194950U (en) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7921085U JPS61194950U (en) | 1985-05-29 | 1985-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61194950U true JPS61194950U (en) | 1986-12-04 |
Family
ID=30623909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7921085U Pending JPS61194950U (en) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61194950U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005005108A (en) * | 2003-06-11 | 2005-01-06 | Hitachi High-Technologies Corp | Focused ion beam device |
| JP2009064790A (en) * | 2008-12-22 | 2009-03-26 | Hitachi High-Technologies Corp | Focused ion beam device |
-
1985
- 1985-05-29 JP JP7921085U patent/JPS61194950U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005005108A (en) * | 2003-06-11 | 2005-01-06 | Hitachi High-Technologies Corp | Focused ion beam device |
| JP2009064790A (en) * | 2008-12-22 | 2009-03-26 | Hitachi High-Technologies Corp | Focused ion beam device |
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