JPS5878562U - Multi-sample equipment such as electron microscopes - Google Patents

Multi-sample equipment such as electron microscopes

Info

Publication number
JPS5878562U
JPS5878562U JP17329481U JP17329481U JPS5878562U JP S5878562 U JPS5878562 U JP S5878562U JP 17329481 U JP17329481 U JP 17329481U JP 17329481 U JP17329481 U JP 17329481U JP S5878562 U JPS5878562 U JP S5878562U
Authority
JP
Japan
Prior art keywords
sample
electron microscopes
sample equipment
moving shaft
exchange device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17329481U
Other languages
Japanese (ja)
Inventor
橋本　信義
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP17329481U priority Critical patent/JPS5878562U/en
Publication of JPS5878562U publication Critical patent/JPS5878562U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の一実施例の要点を示す概略断面図、第
２図は要部の断面図、第３図、第５図は要部の立体図、
第４図はその断面図である。 １・・・試料室、２・・・承、３・・・押しバネ、４・
・・テコ、５・・・ネジ棒、６・・・微動軸、７・・・
０リング、８・・・連結棒、９・・・電子線通路、１０
・・・試料、１１・・・ＯＩＪソング１２・・・筒体、
１３・・・押しバネ、１４・・・試料交換棒、１５・・
・嫡子、１６・・・０リング、１７・・・軸承、１８・
・・微動ツマミ、１９・・・試料台、２０・・・移動軸
、２１・・・ガイドピン、２２・・・筒体、２３・・・
カム溝、２４・・・嫡子、２５・・・０リング、２６・
・・ガイドピン、２７・・・試料押え、２８・・・貫通
穴、２９・・・０リング、３０・・・球面、３１・・・
ガイド溝。 第　３　図 ＼（／ １　（− 魔　ｉｏｔ； 第　４　図 ′）Fig. 1 is a schematic sectional view showing the main points of an embodiment of the present invention, Fig. 2 is a sectional view of the main part, Figs. 3 and 5 are three-dimensional views of the main part,
FIG. 4 is a sectional view thereof. 1... sample chamber, 2... support, 3... push spring, 4...
...Lever, 5...Threaded rod, 6...Fine movement shaft, 7...
0 ring, 8... Connecting rod, 9... Electron beam passage, 10
...Sample, 11...OIJ song 12...Cylinder,
13... Pressing spring, 14... Sample exchange rod, 15...
・Heirloom child, 16...0 ring, 17...bearing, 18.
...Fine movement knob, 19...Sample stage, 20...Movement axis, 21...Guide pin, 22...Cylinder, 23...
Cam groove, 24... legitimate child, 25... 0 ring, 26...
...Guide pin, 27...Sample holder, 28...Through hole, 29...0 ring, 30...Spherical surface, 31...
guide groove. Figure 3 ＼(/ 1 (- devil iot; Figure 4')

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 筒体に挿入された移動軸と前記移動軸の先端に着脱可能
に取り付けられ、複数個の試料を収納し得る試料台と前
記移動軸に対して軸方向に直進移動及び回転移動する手
段を具備した試料交換装置とで構成されたことを特徴と
する電子顕微鏡等の多試料装置。A moving shaft inserted into a cylindrical body, a sample stage that is removably attached to the tip of the moving shaft and capable of accommodating a plurality of samples, and a means for moving linearly and rotationally in the axial direction with respect to the moving shaft. A multi-sample device, such as an electron microscope, characterized in that it is comprised of a sample exchange device and a sample exchange device.
JP17329481U 1981-11-24 1981-11-24 Multi-sample equipment such as electron microscopes Pending JPS5878562U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17329481U JPS5878562U (en) 1981-11-24 1981-11-24 Multi-sample equipment such as electron microscopes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17329481U JPS5878562U (en) 1981-11-24 1981-11-24 Multi-sample equipment such as electron microscopes

Publications (1)

Publication Number Publication Date
JPS5878562U true JPS5878562U (en) 1983-05-27

Family

ID=29965159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17329481U Pending JPS5878562U (en) 1981-11-24 1981-11-24 Multi-sample equipment such as electron microscopes

Country Status (1)

Country Link
JP (1) JPS5878562U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014192108A (en) * 2013-03-28 2014-10-06 Jeol Ltd Holder, charged particle beam device, and vacuum device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014192108A (en) * 2013-03-28 2014-10-06 Jeol Ltd Holder, charged particle beam device, and vacuum device

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