JPS6244452Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a sample moving device of a type (side entry type) in which a sample is inserted from a direction perpendicular to the optical axis in an electron microscope.

As such a side entry type sample moving device, one having a structure as shown in FIG. 1 is widely used.

In the figure, 1 is a lens barrel of an electron microscope, 2 is a tilted body rotatably inserted into the wall of the lens barrel 1, and is placed so that its axis intersects with the electron beam optical axis Z. A holding cylinder 4 is inserted into the inside of the tilting body 2 via a spherical bearing 3 so as to be concentric and rotatable and movable. A sample holder 5 is inserted into the holding cylinder 4 so as to be movable concentrically. One end (vacuum side) of the sample holder 5 is inserted between the upper magnetic pole (not shown) and the lower magnetic pole 6 of the objective lens, and the optical axis Z
The sample 7 is attached to the part where it intersects with. 8 is a push screw for horizontally moving the sample 7 in a direction (Y direction) perpendicular to the axis of the sample holder 5 by rotating the holding cylinder 4 about the spherical bearing 3; They are screwed together. A spring 9 is provided on the opposite side of the push screw 8 to maintain engagement between the push screw and the holding cylinder at all times.

Reference numeral 10 denotes a drive rod movably penetrating and held in the wall of the lens barrel 1. The drive rod is placed on an extension of the axis of the tilting body 2, and is centered on the optical axis Z. is placed on the opposite side from the insertion position into the lens barrel 1. The vacuum side of the drive rod is connected to the tip of the sample holder 5 via a connecting rod 11.
At the connection points 12 and 13 of the connecting rod 11 between the sample holder 5 and the drive rod 10, for example, pin-pots and pivot bearings are used.
1 is engaged with the sample holder 5 and the drive rod 10 so as to be freely tiltable. Reference numeral 14 denotes a spring that always presses the connecting rod 11 toward the drive rod 10 side, and when the sample holder 5 is moved to the right in the figure and pulled out from the holding cylinder 4 for sample exchange, the connecting rod 11 is driven. The spring 14 serves to prevent the drive rod 1 from coming off the rod 10.
It is held in a guide cylinder 15 fixed at zero.

On the other hand, one end of a lever body 16 rotatably held by the lens barrel 1 is engaged with the atmosphere side of the drive rod 10. A set screw 17 screwed into the lens barrel 1 is engaged with the other end of the lever body 16. Therefore, when the push screw 17 is turned to move it back and forth, the back and forth movement is transmitted to the drive rod 10 via the lever body 16, so the connecting rod 11 and sample holder 5 move in the axial direction (X direction). , the sample 7 moves in the X direction. As a result, the sample 7 can be horizontally moved in any direction by arbitrarily operating the push screws 8 and 17. On the other hand, if the tilting body 2 is rotated, the spherical bearing 3, the holding tube 4, and the sample holder 5 rotate, so that the sample 7 can be tilted. Although not shown in the drawings, a push screw is screwed onto the inclined body 2 for swinging the sample holder 5 around the spherical bearing 3 in a direction perpendicular to the plane of the paper and for moving the sample 7 in the optical axis Z direction. There is. Further, keys and key grooves are provided between the holding tube 4 and the sample holder 5, and between the lens barrel 1 and the drive rod 10, respectively, to prevent rotation of the sample holder and the drive rod.

In such a conventional device, the sample holder 5 and the drive rod 1 are connected to each other in order to smoothly swing the sample holder 5 when moving the sample 7 in the Y direction.
A connecting rod 11 is interposed between the connecting rod and the connecting rod. At this time, as shown in FIG. 2, the connecting rod 11 is always subjected to a moment of W·L, where W is the load on the connecting rod and L is the distance from the connecting point 13 to the center of gravity C of the connecting rod. Therefore, it is susceptible to external vibrations.

In view of these points, the present invention aims to improve vibration resistance, and will be explained in detail below with reference to FIG. 3.

FIG. 3 is an enlarged sectional view showing the main parts of the present invention, and the same numbers as in FIGS. 1 and 2 indicate the same components.

That is, in this embodiment, a protrusion, for example, a sphere 18 is attached to the outer circumference of the center of gravity of the connecting rod 11, and a conical receiving surface 19 for receiving the sphere 18 is attached.
The drive rod 10 is characterized by the fact that the drive rod 10 is formed with a. The center of the sphere 18 coincides with the center of gravity C of the connecting rod 11.

Reference numeral 20 denotes a cavity formed in the drive rod 10, and this cavity communicates with the receiving surface 19. The end portion 11a of the connecting rod 11 is inserted into this cavity without contacting the driving body, so that the movement of the connecting rod is not inhibited.

The connecting rod 11 rotates (tilts) about the center of the sphere 18 (the center of gravity C of the connecting rod 11) as a fulcrum in response to the movement of the sample holder 5 in the Y direction or the optical axis Z direction.

If the center of rotation of the connecting rod with respect to the drive rod is configured to coincide with the center of gravity of the connecting rod in this manner, no moment is generated in the connecting rod as in the conventional case. In this way, when no moment is generated in the connecting rod, the apparent rigidity increases significantly compared to one where a moment is generated.
As a result, the vibration resistance is improved, so it is possible to provide a sample moving device that is resistant to external vibrations.

In the above-mentioned embodiment, a sphere was attached to the center of gravity of one connecting rod, but the connecting rod may be divided at the center of the sphere. In this case, it goes without saying that the configuration is such that the moments on the left and right connecting rods are equal with respect to the sphere.

In addition, when engaging the connecting rod with the drive rod, a sphere was used because the sample holder is to be oscillated in the optical axis direction, but there is no need to oscillate the sample holder in the optical axis direction. Sometimes, a cylindrical projection whose axis is parallel to the optical axis Z and intersects with the center of gravity of the connecting rod is attached to the connecting rod, and a receiving surface for receiving this projection is attached to the driving rod. The connecting rod may be formed to have a V-shaped cross section in a plane perpendicular to the optical axis so that it can rotate in a plane perpendicular to the optical axis.

[Brief explanation of the drawing]

FIG. 1 is a plan sectional view showing a conventional example, FIG. 2 is a diagram for explaining the moment generated in the connecting rod shown in FIG. 1, and FIG. 3 is an enlarged sectional view of the main part of the present invention. 1... Lens barrel, 5... Sample holder, 7... Sample, 10... Drive rod, 11... Connection rod, 14...
Spring, 15... Guide cylinder, 16... Lever body,
18... sphere, 19... receiving surface, 20... hollow.

Claims (1)

[Scope of utility model registration request] A holding cylinder 4 whose axis is perpendicular to the electron beam optical axis and rotatably attached to the lens barrel within a plane perpendicular to the optical axis; A sample holder 5 holding a sample 7, means for rotating the holding tube to move the sample in a direction perpendicular to the axis of the sample holder, and an insertion position of the sample holder around the optical axis. a driving body 10 placed on the opposite side, and a connecting rod 11 for connecting the driving body and the sample holder.
and means for moving the driving body in the axial direction of the sample holder in order to move the sample,
a protrusion is provided on the outer periphery of the center of gravity of the connecting rod, a receiving surface 19 for receiving the protrusion is formed on the driving body, and a cavity 20 communicating with the receiving surface is formed on the driving body;
an elastic body 14 for pressing the protrusion against the receiving surface and preventing the connecting rod from coming off from the driving body;
is interposed between the connecting rod and the driving body, one end of the connecting rod is rotatably engaged with the tip of the sample holder, and the other end 11a is inserted into the cavity without contacting the driving body. A sample moving device for an electron microscope, etc., characterized in that it is configured to