JPS593022B2 - Sample tilting device for electron microscopes, etc. - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a sample tilting device that is effective for use in high-resolution electron microscopy.

A gimbal mechanism is widely used as a specimen tilting device in an electron microscope.

However, when using such a gimbal mechanism, the sample holding part (the part inserted inside the magnetic pole piece of the objective lens)
becomes larger, and when tilting the sample, the diameter of the hole in the upper magnetic pole of the objective lens must be increased.As a result, the tilted state of the sample cannot be observed with high resolution.

On the other hand, instead of the gimbal mechanism, a spherical receiving part 2 is provided at the bottom of the sample tube 1 as shown in FIG. A sample tilting device has been proposed.

In this sample tilting device, the sample 3 is tilted by pushing down the upper surface of the sample holding member 4 with the cylindrical body 5 loosely fitted inside the sample tube 1.
can be tilted, and by rotating the cylindrical body 5, the tilt direction of the sample 3 can be changed.

However, in such an apparatus, in order to return the tilted sample 3 to the horizontal position, a cylinder 6 that is loosely fitted inside the cylinder body 5 and pressed downward by a spring (not shown) is connected to the sample holding member 4. It must be in contact with the top surface.

As a result, the entire device becomes complicated and a triple tube is formed.
There is a limit to the small size of the device.

The present invention aims to solve these drawbacks, and will be explained in detail below with reference to the drawings.

FIG. 2 is a sectional view showing one embodiment of the present invention, and FIG. 3 is a cross-sectional view showing one embodiment of the present invention.
It is an AA sectional view of the figure, and 7 is a sample tube.

The sample tube 7 is detachably held on a sample moving table (not shown) movably arranged in the sample chamber, and a spherical (or conical) receiving part is provided at the bottom of the sample tube. 8 is formed, and a sample holding member 9 having a spherical surface corresponding to the spherical surface is rotatably engaged with the receiving portion 8.

A sample 11 is held within the sample holding member 9 via a sample stage 10, and this sample 11 is arranged so as to be located at the center of the spherical surface.

In order to impart springiness to the receiving portion 8 of the sample tube 7, four slots 12a to 12d are formed at 90 degree intervals around the axis of the sample tube. It is possible to eliminate looseness between the sample holding member 9 and the sample holding member 9.

13a and 13b are inclined shafts installed in the sample holding member 9, and the axes X and y of both inclined axes are orthogonal to each other on the center of the sample cylinder 7, and are located within or close to the plane containing the sample. placed within a plane.

Further, the tip of the six inclined shafts 13at13b is connected to the slot 12a.
They each protrude into t12b.

Rectangular guide pieces 14a and 14b are rotatably and movably attached to each of the protruding inclined shafts 13a and 13b.

The guide piece 14a is connected to pins 15a, 15 as shown in FIG.
The other guide piece 14b is also rotatably supported on the plate 16a via the pin 15c,
It is rotatably held via 15a.

The axes of the pins 15a and 15b are placed on a straight line that is perpendicular to the axis X of the tilting shaft 13a and parallel to the axis y of the tilting shaft 13b, and the axes of the other pins 15c and 15d are aligned with the axis X of the tilting shaft 13b.
3b and parallel to the axis X of the tilting shaft 13a.

The plates 16a and 1'6b are connected to the sample tube 7 via screws etc.
Drive rods 17a and 17b movably inserted into the upper part of the
are fixed respectively.

The axial center of one of the drive rods 17a is located within a plane that includes the center of the sample cylinder 7 and the axis X of the tilting shaft 13a, and the other drive rod 17b is located within a plane that includes the center of the sample cylinder 7 and the axis X of the tilting shaft 13b. It is placed in a plane containing the axis y, and each drive rod is provided with a spring 18a.

18b (18b is not shown) is constantly pressed upward with respect to the plane of the paper in FIG. be.

In such a device, a driving mechanism (not shown) drives the rod 19a.
If the guide piece 14a is moved up and down in FIG. 1, the guide piece 14a moves in the same direction via the drive rod 17a and the plate 16a.
The sample holding member 9 is tilted about the axis y of the tilting shaft 13b via the tilting shaft 13a.

Also, if the other rod 19b is moved up and down, the drive rod 17b
Since the guide piece 14b moves in the same direction via the plate body 16b, the sample holding member 9 tilts about the axis X of the tilting shaft 13a via the tilting shaft 13b.

As a result, the sample 11 in the sample holding member 9 is tilted in the same direction, so that the sample can be tilted in any direction and at any angle with respect to the optical axis.

As detailed above, in the present invention, when the sample holding member is tilted, the driving body that applies a pressing force is not provided on the upper surface of the sample holding member, as in the conventional device shown in FIG. 1, but is provided on the side thereof. Therefore, the outer diameter of the portion of the sample tube that holds the sample holding member can be made very small.

Therefore, the objective lens can be incorporated into a high-resolution magnetic pole piece in which the hole diameter of the upper magnetic pole piece is very small.

In addition, since a member pressed by a spring for returning the sample to the horizontal position is not necessary, the structure can be simplified, which has great practical effects.

It should be noted that the above description is an illustration of the present invention, and many modifications can be made in implementing the present invention.

For example, in the above explanation, each plate 16at is connected to the push rod.
16b and the sample holding member 9.
at13b and guide piece 16a.

16b, but the present invention is not limited to this, and as shown in FIG. 21 (or a groove) may be provided.

In this case, the plate 17a must be constantly pressed against the sample holding member 9 by a plate spring or the like.

It is also possible to configure the sample tube to be divided into upper and lower sections to change the sample position in the optical axis direction.

[Brief explanation of drawings]

FIG. 1 is a sectional view for explaining a conventional device, FIG. 2 is a sectional view showing an embodiment of the present invention, and FIGS. 3 and 4 are sectional views for explaining a conventional device.
The AA sectional view and the BB arrow sectional view in the figure, and FIG. 5 are sectional views showing other embodiments of the present invention. In Figures 2 to 4, 7 is a sample tube, 8 is a receiving surface, and 9 is a sample tube.
is a sample holding member, 11 is a sample, 12a to 12d are slots, 13a and 13b are inclined shafts, 14a and 14b are guide pieces, 15a to 15d are pins, 116a and 16b are plates, 17a and 17b are drive rods, 18a and 18b are springs, and 19a and 19b are rods.

Claims (1)

[Scope of Claims] 1. An apparatus comprising a spherical receiver provided at the lower part of a sample tube and a sample holding member held by the receiver,
Two notches are provided along the longitudinal direction of the sample cylinder at positions substantially perpendicular to each other on the cylinder wall, and a first cutout is provided movably along each of the notches. a second drive rod, and the first and second drive rods in order to convert movement of the first and second drive rods into rotation of the sample holding member; Means for engaging the tip of the second driving rod and a side portion of the sample holding member that is substantially on an extension of the sample surface, and means for moving both driving rods. Features: Specimen tilting device for electron microscopes, etc. 2. A sample tilting device for an electron microscope or the like according to claim 1, wherein the notch is a slit provided in a portion that holds a sample.