JPS6244942A - Rotary inclination sample holder - Google Patents

Abstract

PURPOSE:To perform rotation and inclination simultaneously through simple mechanism and operation by providing a sample mounting member having spherical section, a holder for inserting the sample holding member into sample chamber, a bearing section for supporting the spherical section rotatably and inclinably and a drive mechanism. CONSTITUTION:The center of rotation will be the spherical section 23 where the rotary motion is transmitted through a bearing 24 to a shaft 21 and upon motion of rotary drive rod 29 in A-direction, the bearing 24 will move around the rotary drive shaft 26 thus to enable movement of the shaft 21 in B-direction. Consequently, the shaft 21 will rotate around the bearing 25 as shown by dot and dash line C thus to rotate the sample cup 1 in D-direction. The center of inclining motion is the spherical section 22 and it is performed through the bearing 25 such that upon motion of inclination driving rod 33 in E-direction, the bearing 25 is pushed by a spring 32 to rotate around the inclination driving shaft 30 thus to move the shaft 21 in F-direction as shown by dot and dash line G. Here, the bearing 24 will never move but will be the center of movement where the shaft 21 will transmit to the sample cup 1 and incline in H-direction. Since the rotation and the inclination are performed independently without interference, both operation can be performed simultaneously.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a rotating and tilting sample holder that rotatably and tiltably holds a sample in a sample chamber of an electron microscope or the like.

[Conventional technology]

Electron microscopes use a side entry type sample holder that inserts the sample into the sample chamber from the side. FIGS. 7 and 8 are perspective views showing conventional sample holders. 7th
In the figure, a sample cup 1 as a sample mounting body is rotatably supported by a holder 2 and rotated by a wire 3. In FIG. 8, the sample cup 1 is tiltably supported on the holder 2 by a shaft 4, and the shaft 4 is supported by a wire 3.
It can be tilted using the fulcrum as a fulcrum.

[Problem that the invention seeks to solve]

As mentioned above, conventional sample holders only have the functions of rotating or tilting, and there is no sample holder that has both functions. In order to make the sample holder shown in FIGS. 7 and 8 perform other mechanisms, it is necessary to add another mechanism, resulting in a problem that the apparatus becomes complicated and large.

The present invention is intended to solve the above-mentioned problems, and it is an object of the present invention to provide a rotating and tilting sample holder that can be rotated and tilted using a simple mechanism and operation, and that can perform these operations simultaneously. The purpose is

[Means for solving problems]

The present invention provides a sample mounting body having one spherical surface portion, a holder for inserting the sample mounting body into a sample chamber, and a bearing portion provided on the holder to rotatably and tiltably support the spherical surface portion of the sample mounting body. and a drive mechanism that applies force in rotational and tilting directions to the sample mounting body.

[For production]

In the rotating and tilting sample holder of the present invention, a sample is mounted on a sample mounting body attached to the holder, the holder is inserted into a sample chamber, the sample is positioned on the optical axis, and microscopy is performed. At this time, when the drive mechanism applies a force in the direction of rotation or tilt to the sample mount, the spherical part supported by the bearing of the sample mount rotates in an arbitrary direction, so the sample holder responds to the applied force. It is also possible to perform a rotational or tilting motion, and to perform a rotational and tilting motion simultaneously.

〔Example〕

Hereinafter, the present invention will be described with reference to embodiments shown in the drawings. 1st
The figure is a plan view showing a part of the embodiment of the present invention in cross section.
3 is a plan view corresponding to FIG. 1 showing the operating state, FIG. 4 is a sectional view corresponding to FIG. 2 showing the operating state, and FIGS. The same reference numerals as in FIG. 8 indicate the same or corresponding parts.

A sample cup 1 as a sample mounting body has a spherical portion 11 on the outer periphery, and a sample mounting space 12 and a beam transmission space 1 inside.
It has 3. The holder 2 is composed of a long frame-like body so that the sample cup 1 can be inserted through the side wall of the sample chamber on the optical axis.

The sample cup 1 containing the sample fits into a conical bearing 14 provided at the tip of the holder 2, and the spherical part 11 is supported by the bearing 14, allowing it to move freely without being restricted in the direction of movement and rotate. and can be tilted. 15 is bearing 14
It is a bearing member constituting a part of the holder 2 and is fixed to the holder 2 with a screw 16.

The sample cup 1 has a bearing 19 that accommodates a spherical part 18 provided at the tip of a sample cup drive transmission shaft 17. No matter which direction the spherical part 18 moves, the transmission shaft 17 pushed by a spring 20 moves the sample. It is designed to push cup 1. The sample cup drive transmission shaft 17 is inserted into the shaft 21 so that it can move back and forth.

The shaft 21 has a spherical part 22.23 and a bearing 24.2.
Supported by 5. The bearing 24 transmits rotational motion and serves as a bearing during tilting, and is provided so as to be able to freely rotate around the rotation drive shaft 26.
It is pushed by a spring 28 via a rotary drive rod 29, and its movement is restricted by a rotation drive rod 29. The bearing 25 is provided so as to be able to freely rotate around the tilting drive shaft 30, is pushed by a spring 32 via a spherical part 31, and its movement is restricted by a tilting drive rod 33.

-4 = In the above configuration, the sample mounting space 12 of the sample cup 1
A sample is mounted on the holder 2, the holder 2 is inserted into the sample chamber, the sample is positioned on the optical axis, and microscopy is performed. FIG. 3 shows a state of rotational movement, in which the center of rotation is the spherical portion 23, and the rotational movement is transmitted to the shaft 21 by the bearing 24. First, when the rotary drive rod 29 moves in the direction of arrow A, the bearing 24 is pushed by the rotary drive rod 29 and moves around the rotary drive shaft 26 against the spring 28 . The bearing 24 has a spherical portion 2
2 is housed without play, so if the bearing 24 moves, the shaft 21 can be moved in the direction of arrow B. Therefore, the shaft 21 rotates about the bearing 25 as shown by the chain line C. At the tip of the shaft 21 is a sample cup drive transmission shaft 1.
7 is inserted so that it can expand and contract in accordance with the movement of the sample cup 1, so that the sample cup 1 can be rotated in the direction indicated by the arrow without play according to the movement of the shaft 21.

FIG. 4 shows the state of the tilting operation, in which the center of the tilting excitation is the spherical part 22, and the tilting movement is performed by the bearing 25. First, when the tilt drive rod 33 moves in the direction of arrow E,
The bearing 25 is pushed by the spring 32 and rotates around the tilt drive shaft 30. Since the spherical part 23 is housed in the bearing 25 without play, when the bearing 25 moves, the shaft 21 is moved in the direction of the arrow F as shown by the chain line G. At this time, the bearing 24 does not move and becomes the center of movement. In this way, the shaft 21 has a bearing 22
The movement of the bearing 25 about the center is transmitted to the sample cup 1 via the transmission shaft 17, and the sample cup 1 is tilted in the direction of the arrow H.

These rotation and tilt operations are independent and do not interfere with each other, so both operations can be performed at the same time.

5 and 6 show other embodiments, in which 2
The shafts 21a and 21b of the book are supported by bearings 24 and 25, and rotation or tilting motion about the shaft 26.30 is transferred to the sample cup drive transmission shaft 1 by the clamping part 34.35.
7 can be communicated. In FIG. 6, the sample cup 1 is in contact with the bearings 24, 25 via the sphere 36,
Rotational or tilting motion about the shafts 26, 30 applied by the wires 3a, 3b is transmitted from the bearings 24, 25 to the sample cup 1 via the sphere 36.

In the above description, the sample mounting body is not limited to the sample cup 1, but may be of any other shape, such as a plate shape, as long as it can move freely due to the spherical portion 11. Further, the bearing 14 is not limited to a conical shape, but may be spherical or other shapes.

The drive mechanism is not limited to the one shown in the drawings, and can be modified, and the tilting operation is not limited to tilting in the axial direction of the shaft 21, but may also be tilting around the axis of the shaft 21.

〔Effect of the invention〕

According to this invention, the spherical part is formed in the sample mounting body and is supported so as to be rotatable and tiltable, so that rotation and tilting can be performed by a simple mechanism and operation, and these operations can be performed simultaneously. I can do it.

[Brief explanation of the drawing]

Fig. 1 is a plan view showing a part of the embodiment in cross section, Fig. 2 is a sectional view taken along the line - - Fig. 4, Figs. Partial perspective views of examples, FIGS. 7 and 8, are perspective views of conventional sample holders. In each figure, the same reference numerals indicate the same or equivalent parts, 1 is the sample cup, 2 is the holder, 11 is the spherical part, 14.24.2
5 is a bearing, 17 is a sample cup drive transmission shaft, 1.8, 22
, 23 and 31 are spherical parts, 21 is a shaft, 26 and 30 are axes, 29 is a rotary drive rod, and 33 is a tilt drive rod.

Claims (4)

[Claims] (1) A sample mounting body having a spherical surface portion, a holder for inserting the sample mounting body into a sample chamber, and a bearing portion provided on the holder so as to rotatably and tiltably support the spherical surface portion of the sample mounting body. and a drive mechanism that applies force in rotational and tilting directions to the sample mounting body. (2) The rotating inclined sample holder according to claim 1, wherein the sample mounting body is a sample cup. (3) The rotary tilting sample holder according to claim 1 or 2, wherein the bearing portion is conical or spherical. (4) The rotation according to any one of claims 1 to 3, wherein the drive mechanism supports the spherical part of the shaft connected via the spherical part with a bearing movable in different directions. Tilted sample holder.