JPS6244451Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a sample moving device of a type (side entry type) in which a sample is inserted from a direction perpendicular to the optical axis in an electron microscope.

As such a side entry type sample moving device, one having a structure as shown in FIG. 1 is widely used.

In the figure, 1 is a lens barrel of an electron microscope, 2 is a tilted body rotatably inserted into the wall of the lens barrel 1, and is placed so that its axis intersects with the electron beam optical axis Z. A holding cylinder 4 is installed inside the inclined body 2 via a spherical bearing 3.
are inserted concentrically and rotatably and movably. A sample holder 5 is inserted into the holding cylinder 4 so as to be movable concentrically. One end (vacuum side) of the sample holder 5 is inserted between the upper magnetic pole (not shown) and the lower magnetic pole 6 of the objective lens, and a sample 7 is attached to the portion intersecting the optical axis Z.
8 is a push screw for horizontally moving the sample 7 in the direction (Y direction) perpendicular to the axis of the sample holder 5 by rotating the holding cylinder 4 about the spherical bearing 3; They are screwed together. A spring 9 is provided on the opposite side of the push screw 8 to maintain engagement between the push screw and the holding cylinder at all times.

Reference numeral 10 denotes a drive rod movably passed through and held in the wall of the microscope column 1, the drive rod being placed on an extension of the axis of the tilt body 2 and placed on the opposite side of the optical axis Z to the insertion position of the sample holder 5 into the microscope column 1. The vacuum side of the drive rod is connected to the tip of the sample holder 5 via a connecting rod 11.
At the connection points 12 and 13 between the sample holder 5 and the drive rod 10 of the connecting rod 11, for example, pivot bearings are used.
The connecting rod 11 is engaged with the sample holder 5 and the driving rod 10 so that it can tilt freely, respectively. A spring 14 is used to constantly press the connecting rod 11 against the driving rod 10.
When the connecting rod 11 is moved to the right in the figure and pulled out from the retaining tube 4, the spring 14 serves to prevent the connecting rod 11 from coming off the driving rod 10.
The guide tube 15 is held by the guide tube 15 fixed to the guide tube 15.

On the other hand, one end of a lever body 16 rotatably held by the lens barrel 1 is engaged with the atmosphere side of the drive rod 10. A set screw 17 screwed into the lens barrel 1 is engaged with the other end of the lever body 16. Therefore, when the push screw 17 is turned to move it back and forth, the back and forth movement is transmitted to the drive rod 10 via the lever body 16, so the connecting rod 11 and sample holder 5 move in the axial direction (X direction). , the sample 7 moves in the X direction. As a result, the sample 7 can be horizontally moved in any direction by arbitrarily operating the push screws 8 and 17. On the other hand, if the tilting body 2 is rotated, the spherical bearing 3, the holding tube 4, and the sample holder 5 rotate, so that the sample 7 can be tilted. Although not shown in the drawings, a push screw is screwed onto the inclined body 2 for swinging the sample holder 5 around the spherical bearing 3 in a direction perpendicular to the plane of the paper and for moving the sample 7 in the optical axis Z direction. There is. Further, keys and key grooves are provided between the holding tube 4 and the sample holder 5, and between the lens barrel 1 and the drive rod 10, respectively, to prevent rotation of the sample holder and the drive rod.

In such a conventional device, the sample holder 5 and the drive rod 1 are connected to each other in order to smoothly swing the sample holder 5 when moving the sample 7 in the Y direction.
Since the connecting rod 11 is interposed between the
It has poor vibration resistance and is easily affected by external vibration.

In view of these points, the present invention aims to improve vibration resistance, as shown in Figures 2 and 3 below.
This will be explained in detail based on the diagram.

Figure 2 is an enlarged sectional view showing the main parts of the present invention;
The figure is an enlarged sectional view taken along the line AA in FIG. 2, and the same numbers as in FIG. 1 indicate the same components.

That is, in this embodiment, a receptor 18 is formed on the outer periphery of the connecting rod 11, and a connecting point 13 between the driving rod 10 and the connecting rod 11 is formed on the side surface of the receptor on the driving rod 10 side (or the sample holder side). Centered spherical receiving surface 1
9, and several leaf springs 20a, 20b, 20c, 20d and 20e that contact the receiving surface 19.
It is characterized in that it is fixed to the guide tube 15 (drive rod 10). Projections 21a to 21e are fixed to each of the leaf springs 20a to 20e, respectively, and these projections contact the receiving surface 19 of the receiving body 18.

In this way, the connecting rod 11 rotates (tilts) about the connecting point 13 in accordance with the movement of the sample holder 5 in the Y direction or the optical axis Z direction, but at this time, the receiving surface 19 of the connecting rod moves while sliding on the projections 21a to 21e. Therefore, friction occurs at each contact point. In this way, when there is friction in the contact part, the apparent rigidity increases significantly compared to one without friction, and as a result, the vibration resistance improves, so we provide a sample moving device that is resistant to external vibrations. be able to.

In the above explanation, the connection rod is provided with a receptor and the drive rod is provided with a leaf spring, but conversely, the drive rod is provided with a receptor that protrudes toward the connection rod, and the connection rod is provided with a leaf spring. The same effect as described above can be obtained even if .

In addition, in order to swing the sample holder in the optical axis direction, the contact surface of the connecting rod's flange with the leaf spring was made spherical, but when there is no need to swing the sample holder in the optical axis direction, , it may be formed in a cylindrical surface centered on the connecting point between the drive rod and the connecting rod, or in a plane perpendicular to the axis of the connecting rod.

[Brief explanation of the drawing]

FIG. 1 is a plan sectional view showing a conventional example, FIG. 2 is an enlarged sectional view showing essential parts of the present invention, and FIG. 3 is an enlarged sectional view taken along line A-A in FIG. DESCRIPTION OF SYMBOLS 1... Lens barrel, 5... Sample holder, 7... Sample, 10... Drive rod, 11... Connection rod, 12 and 13... Connection point, 14... Spring, 15...
Guide tube, 16... lever body, 18... receiver, 19...
...Receiving surface, 20a to 20e...plate spring, 21a to 21e...protrusion.

Claims (1)

[Scope of utility model registration request] A holding cylinder 4 whose axis is perpendicular to the electron beam optical axis and rotatably attached to the lens barrel 1 within a plane perpendicular to the optical axis; and a holding cylinder 4 movably inserted into the holding cylinder. a sample holder 5 holding a sample 7; a means for rotating the holding cylinder to move the sample in a direction perpendicular to the axis of the sample holder; and insertion of the sample holder around the optical axis. A driving body 10 placed on the opposite side of the position, a connecting rod 11 connecting the driving body and the tip of the sample holder and engaged so as to be able to rotate with each other at respective connection points, a means for moving the driving body in the axial direction of the sample holder for movement; a guide member 15 integrally attached to the driving body so as to surround the connecting rod; and a guide member 15 for removing the connecting rod from the driving body. an elastic body 1 interposed between the connecting rod and the guide member to prevent
4, one of the guide member and the connecting rod is provided with a receiving surface 19 projecting toward the other, and the receiving surface is a plane perpendicular to the axis of the connecting rod, or both of the guiding member and the connecting rod are provided with a receiving surface 19 that projects toward the other, or both of the guiding member and the connecting rod A sample moving device for an electron microscope or the like, which has a cylindrical or spherical surface centered at a connection point with a connecting rod, and is provided with an elastic body 20 on the other of the guide member and the connecting rod that contacts the receiving surface.