JPH0322846Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an improvement of a side entry type sample moving device for inserting a sample from a direction perpendicular to the optical axis in an electron microscope or the like.

[Prior Art] In this type of sample moving device, a sample holder on which a plurality of samples are mounted is used in order to observe a large number of samples in one sample exchange operation. In this case, in order to quickly exchange the sample during observation, a device incorporating a coarse movement mechanism for rough movement is used in addition to the normal fine movement mechanism for searching the field of view, as shown in Figure 3. It is used.

In the figure, 1 is the mirror body of an electron microscope, and 2 is a cylinder fixed through the mirror body 1, and its axis is placed so that it coincides with the X axis perpendicular to the optical axis Z. . 3 is a holding cylinder rotatably held inside this cylinder 2 via a spherical bearing 4; 5 is a sample holder movably inserted into this holding cylinder 3; the end on the vacuum side is plate-shaped; It is placed between an upper magnetic pole piece and a lower magnetic pole piece of an objective lens (not shown), and two samples 6a and 6b are attached to this plate-shaped portion. Reference numeral 7 denotes a set screw for rotating the cylindrical body 3 about the spherical bearing 4, and is screwed into the cylindrical body 2. Further, a spring 8 is provided in the opposite direction of the push screw 7 to maintain the engagement between the push screw and the cylindrical body at all times. Therefore, by moving the push screw 7 back and forth, the sample holder 5 , that is, with the samples 6a and 6b on the optical axis Z
It can be moved in the Y-axis direction perpendicular to the axis.

Reference numeral 9 denotes a first movable body in the shape of a cylinder with a bottom, which is placed on the X-axis and on the opposite side of the cylinder body 2 with the optical axis Z as the center, and is detachably attached to the mirror body 1. The holding body 10 is movably inserted through a key 11 and a key groove 12 in a state where rotation is prevented. Further, the vacuum side of this movable body is connected to the tip of the sample holder 5 via a connecting rod 13 inserted into the movable body. The engaging portions between the movable body and the connecting rod and between the connecting rod and the sample holder are respectively pivot bearings so that they can rotate relative to each other. Further, a threaded portion 14 is formed on the outer periphery of the other end of the movable body 9. 15 is this moving body 9
A second movable body placed at a certain distance on the atmospheric side of the holder 15 is placed on the X axis like the first movable body 9, and this movable body 15 is removably attached to the holding body 10. It is movably supported by a fixed lid 16 via a key 17 and a key groove 18 in a state where rotation is prevented. Further, a threaded portion 19 is formed on the outer periphery of the movable body 15 on the side facing the first movable body 9. These two threaded portions 14 and 19 have left-handed threads on the 14 side and right-handed threads on the 19 side. 20 is the first moving body 9, 1
5, which are screwed into threaded parts 14 and 19, respectively, and have a grip part 21.

Reference numeral 22 denotes a lever body rotatably attached to the lid body 16 via a shaft 23, one end (point of application) is engaged with the second movable body 15, and the other end (point of force) is a lever body. Meter head 24 is engaged. This micrometer head is fixed to a case 25 attached to the lid 16. Also,
When the lever body 22 and the second movable body 15 are engaged, the first and second movable bodies 9, 1
5 is locked by a lever body 22 to prevent it from being drawn into the mirror body 1. Therefore, by turning the micrometer head 24 and rotating the lever body 22 clockwise or counterclockwise, the second movable body 15
moves in the left-right direction along the
b moves in the X direction. Furthermore, by turning the nut 20, the rotation of the first and second movable bodies 9 and 15 is prevented, and the movement of the second movable body is prevented by the lever body 22.
Since the nut 20 moves along the X-axis, the sample holder 5 moves in the X-axis direction via the first moving body 9 regardless of the operation of the micrometer head 24. As a result, by forming the pitch of the nut 20 to be larger than the pitch of the micrometer head 24, the sample holder 5 can be moved by a rough movement distance, so that the samples 6a and 6b can be exchanged quickly. be able to. Here, since the threaded portion 14 of the first moving body 9 that the nut 20 is screwed into is a left-handed thread, and the threaded portion 19 of the second moving body 15 is a right-handed thread, when the nut is rotated, On the other hand, the first moving body moves by the same amount in the same direction as the nut's movement direction. Therefore, the amount of movement of the sample holder 5 is the sum of the amounts of movement of the nut 20 and the first moving body 9.

Reference numeral 27 denotes a coil spring placed inside the first movable body 9, which is used to prevent the connecting rod 13 from coming off from the movable body 9 when the sample holder 5 is taken out into the atmosphere for sample exchange. It is.

[Problems to be solved by the invention] However, in such a sample moving device, in order to minimize leakage from the vacuum seal part during sample movement due to high cleanliness and high vacuum in the sample chamber, the first moving body 9 and holding body 1
Metal bellows 26 is used as a vacuum seal between
is used. Therefore, as is clear from the figure, the end of the moving body 9 on the sample holder 5 side is connected to the holder 10.
Since the structure is such that the movable body 9 is protruded from the holder 10, the movable body 9 is supported by a cantilever burr. Particularly, in a sample device of the type shown in the figure, in which a large number of samples are loaded into a sample holder, the sample holder must be moved significantly in order to exchange samples. Correspondingly, the amount of movement of the first moving body also increases, and the portion of this moving body that protrudes from the holder becomes very long. As a result, the structure has very low vibration resistance, making it susceptible to external vibrations and causing a decrease in resolution.

In view of these points, the present invention aims to improve the resolution by creating a structure with strong vibration resistance.

[Means for Solving the Problems] In order to achieve the above object, the present invention is arranged so that the axis is perpendicular to the electron beam optical axis and rotated with respect to the mirror within a plane perpendicular to the optical axis. a movably attached holding cylinder; a sample holder movably inserted into the holding cylinder and holding a sample; and rotating the holding cylinder to move the sample in a direction perpendicular to the axis of the sample holder. a bottomed cylindrical movable body movably penetrating the mirror body at a position opposite to the insertion position of the sample holder with the optical axis as the center; a connecting body for connecting the moving body and the sample holder; the moving body;
A sample moving device for an electron microscope, etc., comprising a connecting body and a means for moving the sample in the axial direction of the sample holder via the sample holder,
between the sample holder side outer periphery of the movable body and the mirror body,
It is characterized in that a ring with gas vent holes formed on its side surface is disposed, and annular elastic bodies are interposed between the ring and the movable body and the mirror body, respectively.

[Embodiment] FIG. 1 is an enlarged sectional view of the main parts showing an embodiment of the present invention, and the same numbers as in FIG. 3 indicate the same components.

That is, in this embodiment, the bulge 1a is formed on the mirror body 1, and the ring 28 is disposed between this bulge and the outer circumference of the protrusion A of the movable body 9. It is characterized in that O-ring packings 29 and 30 are interposed between the vehicle and the moving body, respectively.

By doing this, the movable body 9 has one end connected to the holding body 1.
0, and the other end is supported by ring 28 and O.
It is supported by the mirror body 1 via ring packings 29 and 30. In other words, since the first moving body is supported at both ends, the natural frequency of this moving body can be increased structurally.

Here, if the natural frequency of the first moving body 9 is _fo , the frequency of the mirror body 1 is f, the amplitude of the lens barrel is _A0 , and the amplitude of the moving body is Ar, then Ar= _A0・( f/f _o ) ² , the natural frequency f _o of the moving body 9 becomes high, and the amplitude Ar of the moving body becomes small, making it less susceptible to external vibrations.

Moreover, since the O-ring packing 30 is interposed between the movable body 9 and the ring 28, the movable body can be moved smoothly. Furthermore, 2
Mirror body 1 is fixed by two O-ring packings 29 and 30.
can absorb vibrations from

Furthermore, when the ring 28 is arranged as described above,
The air left when the sample moving device was assembled remains in the space on the left side of the ring 28, that is, on the vacuum side (inside the sample chamber) and on the opposite side (atmosphere side), and the space becomes at the same pressure as the atmosphere. It's summery. Therefore, when the sample chamber is evacuated to a vacuum state, an extremely large force is applied to the ring 28, but an elastic body such as an O-ring packing is interposed between the ring, the moving body 9, and the mirror body 1. As a result, the ring itself is sucked into the sample chamber (vacuum side). Therefore, in order to prevent such a situation from occurring, a large number of gas vent holes 31 are formed on the side surface of the ring 28, and when the sample chamber is evacuated, the space is also evacuated through the holes. This prevents gas from accumulating in the space.

It should be noted that the above description is an example of the present invention, and many modifications may be made in its implementation. For example, an elastic body such as an O-ring packing is interposed between the ring and the mirror body and the moving body, but it is not limited to this, and an annularly formed elastic body such as Teflon or urethane may be used. It's okay. Furthermore, if the shape of the ring is made wider on the side closer to the mirror body 1 as shown in FIG. Accordingly, it is possible to prevent the ring from falling down. Furthermore, although the first movable body 9 is passed through the holder 10 fixed to the mirror body, it goes without saying that it may be passed directly through the mirror body. Furthermore, although the case has been described in which a screw mechanism for coarse movement is incorporated between the first moving body 9 and the micrometer head 24, it is also possible to directly drive the first moving body by the micrometer head. You can leave it out.

[Effects of the invention] As described above, according to the invention, the natural frequency of the moving object can be increased without hindering the movement of the moving object, so it is possible to create a structure that is extremely resistant to external vibrations. This makes it possible to improve the resolution of electron microscope images.

[Brief explanation of the drawing]

FIG. 1 is an enlarged sectional view of the main parts showing one embodiment of the present invention, FIG. 2 is a diagram showing another embodiment of the present invention,
FIG. 3 is a sectional view for explaining a conventional example. 1: Mirror body, 5: Sample holder, 6a, 6b: Sample, 9: First moving body, 10: Holding body, 13: Connecting rod, 14, 19: Threaded part, 15: Second moving body, 16 : Lid body, 20: Natsuto, 22: Lever body,
24: Micrometer head, 26: Metal bellows, 28: Ring, 29, 30: O-ring packing, 31: Hole.

Claims (1)

[Scope of utility model registration request] a holding cylinder disposed such that its axis is perpendicular to the electron beam optical axis and rotatably attached to the mirror body within a plane perpendicular to the optical axis; a sample holder holding a sample; a means for rotating the holding cylinder to move the sample in a direction perpendicular to the axis of the sample holder; and a side opposite to the insertion position of the sample holder with respect to the optical axis. a bottomed cylindrical moving body movably penetrating the mirror body at a position, a connecting body placed inside the moving body and for connecting the moving body and the sample holder, the moving body, In a sample moving device for an electron microscope, etc., comprising a connecting body and a means for moving the sample in the axial direction of the sample holder via the sample holder, between the sample holder side outer periphery of the moving body and the mirror body. A sample moving device for an electron microscope, etc., in which a ring having a gas vent hole formed on its side is disposed, and annular elastic bodies are interposed between the ring, a movable body, and a mirror body, respectively.