JPH02143761U - - Google Patents
Info
- Publication number
- JPH02143761U JPH02143761U JP5243089U JP5243089U JPH02143761U JP H02143761 U JPH02143761 U JP H02143761U JP 5243089 U JP5243089 U JP 5243089U JP 5243089 U JP5243089 U JP 5243089U JP H02143761 U JPH02143761 U JP H02143761U
- Authority
- JP
- Japan
- Prior art keywords
- sample holder
- sample
- moving
- electron microscope
- shafts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 238000012856 packing Methods 0.000 claims 1
Description
第１図は本案の一実施例を示す縦断面図である
。
１…試料室、２…支持体、３…Ｏリング、４…
試料ホールダ、５…Ｏリング、６…先端、７…試
料台、８…試料、９…対物レンズ、１０…移動棒
。
FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention. 1... Sample chamber, 2... Support, 3... O-ring, 4...
Sample holder, 5... O-ring, 6... Tip, 7... Sample stage, 8... Sample, 9... Objective lens, 10... Moving rod.
Claims (1)
直交する方向から挿入し、Ｏリングパツキングで
気密を保ちながら試料ホールダを軸心方向に移動
させて試料の移動を行うようにした試料ホールダ
において、試料ホールダに設けられたＯリングパ
ツキングが摺動する内壁の一部又は全長と試料ホ
ールダが嵌合するように構成し試料ホールダの嵌
合する表面に摩擦係数の小さな被膜をつけたこと
を特徴とする電子顕微鏡に於ける試料ホールダの
構造。 ２ 前記試料ホールダは２本以上の軸で構成され
その接続部はテーパー嵌合とした請求の範囲第１
項に記載された電子顕微鏡に於ける試料ホールダ
の構造。[Scope of Claim for Utility Model Registration] 1. Moving the sample by inserting the sample holder holding the sample from a direction perpendicular to the electron beam optical axis and moving the sample holder in the axial direction while maintaining airtightness with O-ring packing. In a sample holder designed to perform A structure of a sample holder in an electron microscope characterized by having a small film attached thereto. 2. The sample holder is composed of two or more shafts, and the connecting portion thereof is tapered fitting.
The structure of the sample holder in the electron microscope described in Section 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5243089U JPH02143761U (en) | 1989-05-08 | 1989-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5243089U JPH02143761U (en) | 1989-05-08 | 1989-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02143761U true JPH02143761U (en) | 1990-12-06 |
Family
ID=31572728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5243089U Pending JPH02143761U (en) | 1989-05-08 | 1989-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02143761U (en) |
-
1989
- 1989-05-08 JP JP5243089U patent/JPH02143761U/ja active Pending
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