JPH0272963U - - Google Patents
Info
- Publication number
- JPH0272963U JPH0272963U JP15339988U JP15339988U JPH0272963U JP H0272963 U JPH0272963 U JP H0272963U JP 15339988 U JP15339988 U JP 15339988U JP 15339988 U JP15339988 U JP 15339988U JP H0272963 U JPH0272963 U JP H0272963U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- charged particle
- sample
- particle analyzer
- same axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 239000002245 particle Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims 4
- 230000001678 irradiating effect Effects 0.000 claims 1
Description
第１図は一実施例を示す概略断面図、第２図及
び第３図は従来の円筒鏡面型荷電粒子アナライザ
を示す概略断面図である。
２…試料、４…一次電子ビーム、６…円筒鏡面
型荷電粒子アナライザ、８…電子銃、１０…オー
ジエ電子、１２…検出器、１４…試料ステージ、
１６…内円筒電極、１８…外円筒電極、２０…円
筒軸、２２，２４…スリツト、２６…対物レンズ
、２８…ミラー、３０…接眼レンズ、３２…ハー
フミラー、３４…光源。
FIG. 1 is a schematic sectional view showing one embodiment, and FIGS. 2 and 3 are schematic sectional views showing a conventional cylindrical mirror-surface type charged particle analyzer. 2... Sample, 4... Primary electron beam, 6... Cylindrical mirror charged particle analyzer, 8... Electron gun, 10... Augier electron, 12... Detector, 14... Sample stage,
16... Inner cylindrical electrode, 18... Outer cylindrical electrode, 20... Cylinder axis, 22, 24... Slit, 26... Objective lens, 28... Mirror, 30... Eyepiece lens, 32... Half mirror, 34... Light source.
Claims (1)
同軸に配置された円筒鏡面型荷電粒子アナライザ
の内部の同軸上に、試料に一次電子ビームを照射
する電子銃が組み込まれたものにおいて、同じ内
部の同軸上で前記電子線よりも試料側に、中心に
前記一次電子ビームが通る孔の開いた光学素子が
設けられ、該光学素子を含み焦点が固定された光
学顕微鏡が備えられていることを特徴とする荷電
粒子アナライザ。 In a cylindrical mirror-type charged particle analyzer in which an inner cylindrical electrode, an outer cylindrical electrode, and an annular slit are coaxially arranged, and an electron gun for irradiating a sample with a primary electron beam is built in on the same axis, An optical microscope including an optical element having a hole in the center through which the primary electron beam passes is provided on the same axis closer to the sample than the electron beam, and an optical microscope including the optical element and having a fixed focus is provided. charged particle analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15339988U JPH0272963U (en) | 1988-11-24 | 1988-11-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15339988U JPH0272963U (en) | 1988-11-24 | 1988-11-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0272963U true JPH0272963U (en) | 1990-06-04 |
Family
ID=31429203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15339988U Pending JPH0272963U (en) | 1988-11-24 | 1988-11-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0272963U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007127637A (en) * | 2005-10-28 | 2007-05-24 | Thermo Fisher Scientific Inc | Spectroscopy system and method for surface analysis |
-
1988
- 1988-11-24 JP JP15339988U patent/JPH0272963U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007127637A (en) * | 2005-10-28 | 2007-05-24 | Thermo Fisher Scientific Inc | Spectroscopy system and method for surface analysis |
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