JPS649208U

JPS649208U -

Info

Publication number: JPS649208U
Application number: JP10468987U
Authority: JP
Priority date: 1987-07-07
Filing date: 1987-07-07
Publication date: 1989-01-18

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例を示す断面図、第２
図は偏向部材を示す一部を切り欠いた斜視図、第
３図は偏向部材の変形例を示す断面図、第４図は
従来の落射暗視野照明装置を示す断面図である。１１…顕微鏡本体、１２…リング状反射鏡、１
３…レボルバ、１４…対物レンズ、１５…鏡筒、
１６…偏向部材としての輪帯状プリズム、１６Ｂ
，１６Ｃ…反射面、１７…リング状集光部材、１
８…検査対象物、３１Ａ，３１Ｂ…偏向部材とし
ての輪帯状反射鏡、Ｓ…観察光軸。 Fig. 1 is a sectional view showing one embodiment of the present invention;
3 is a sectional view showing a modified example of the deflecting member, and FIG. 4 is a sectional view showing a conventional epi-illumination dark-field illumination device. 11...Microscope main body, 12...Ring-shaped reflecting mirror, 1
3... revolver, 14... objective lens, 15... lens barrel,
16... Annular prism as a deflection member, 16B
, 16C... Reflective surface, 17... Ring-shaped condensing member, 1
8... Object to be inspected, 31A, 31B... Annular reflecting mirror as a deflection member, S... Observation optical axis.

Claims

[Claims for Utility Model Registration] (1) The microscope body is provided with a revolver for selectively switching a plurality of types of objective lenses onto the observation optical axis, and the aperture of the ring-shaped parallel light beam is adjusted to the circumference of the objective lens. In an epi-illuminated dark-field illumination device for a microscope, which has a deflection member that expands the beam to pass through the object, and a condensing member that focuses the ring-shaped parallel light beam expanded by the deflection member onto the surface of an object to be inspected, the deflection member is . An epi-illuminated dark field illumination device for a microscope, characterized in that it is fixedly provided on the observation optical axis regardless of the switching operation of the revolver. (2) In paragraph 1 of the claims for utility model registration,
An epi-illumination dark-field illumination device for a microscope, wherein the deflection member is provided on a fixed member side within the revolver. (3) In paragraph 1 of the claims for utility model registration,
An epi-illumination dark-field illumination device for a microscope, wherein the deflection member is provided on the microscope main body. (4) Scope of claims for utility model registration, paragraphs 1 to 3
In any of the above items, the deflection member is formed by an annular prism whose optical axis coincides with the observation optical axis and which has inclined reflecting surfaces parallel to each other on the inner circumferential surface side and the outer circumferential surface side. An epi-illuminated dark-field illumination device for a microscope, characterized in that: