CN219455999U

CN219455999U - SEM sample stage

Info

Publication number: CN219455999U
Application number: CN202222823468.3U
Authority: CN
Inventors: 凌明华; 徐帅; 李闯; 张红伟; 黄海东; 胡天齐; 王毅明; 方新军; 戚玉霞
Original assignee: Sichuan Heshengda Electronic Technology Co ltd; Jiangsu Heda Electronic Technology Co ltd
Current assignee: Sichuan Heshengda Electronic Technology Co ltd; Jiangsu Heda Electronic Technology Co ltd
Priority date: 2022-10-25
Filing date: 2022-10-25
Publication date: 2023-08-01
Anticipated expiration: 2032-10-25

Abstract

The utility model discloses an SEM sample stage, which belongs to the technical field of SEM microscope parts and comprises a bottom table part; the bulge part is integrally formed on the working surface of the bottom table part, and the upper surface and the two side surfaces of the bulge part are used as the attachment surfaces of the sample; the fixing piece is made of conductive materials, is fixed on the working surface of the base table part and is positioned on one side of the protruding part; and a moving member. The fixing piece and the moving piece are respectively arranged on two sides of the protruding portion of the working face of the base portion through integral forming, and the fixing piece is fixed on the working face of the base portion through linear movement of the moving piece in a matched mode, so that the distance between the fixing piece and the moving piece relative to the clamping face is adjusted, samples adhered to two side faces of the protruding portion are clamped, and the fixing piece and the moving piece are used as conductive media of the samples, and imaging definition is improved.

Description

SEM sample stage

Technical Field

The utility model belongs to the technical field of SEM microscope parts, and particularly relates to an SEM sample stage.

Background

Scanning Electron Microscopy (SEM) is a viewing means between transmission electron microscopy and optical microscopy. The method uses a focused very narrow high-energy electron beam to scan a sample, excites various physical information through the interaction between the beam and a substance, and collects, amplifies and re-images the information so as to achieve the aim of representing the microscopic morphology of the substance.

In the prior SEM, a sample and a sample table are connected through conductive adhesive in the use process, in the actual use process, the sample is not firmly stuck due to gaps between the sample and the conductive adhesive, and in the shooting process, the imaging drift of the sample is fuzzy due to the charge effect, so that the observation result is influenced

Disclosure of Invention

The utility model aims to provide an SEM sample stage, which solves the problem of the prior art in the use process.

In order to achieve the above purpose, the present utility model provides the following technical solutions: an SEM sample stage comprising a base stage portion;

the bulge part is integrally formed on the working surface of the bottom table part, and the upper surface and the two side surfaces of the bulge part are used as the attachment surfaces of the sample;

the fixing piece is made of conductive materials, is fixed on the working surface of the base table part and is positioned on one side of the protruding part;

and the moving part is made of conductive materials, is positioned on the other side of the fixed part, can linearly move and stay along the direction approaching or separating from the fixed part, clamps the sample adhered to the two sides of the protruding part by opposite clamping faces in the fixed part and the moving part, and is used as a conductive medium of the sample.

Preferably, the fixed member and the movable member are each made of a metal material.

Preferably, the fixing member and the movable material are aluminum.

Preferably, the base portion is a circular base body, and the protruding portion extends along a diameter direction of the upper working surface of the base portion.

Preferably, the length of the fixing member and the moving member is greater than the length of the protruding portion, and both ends of the fixing member and the moving member extend to the outside of the upper working surface in the base table portion.

Preferably, the fixing member is a rectangular block extending along the length direction of the protruding portion, and the working surface of the fixing member is provided with a threaded hole at a first end position.

Preferably, the moving member includes a clamping portion, an arm body portion and a step portion, the clamping portion extends along a length direction of the protruding portion, the arm body portion is formed by extending two ends of the clamping portion towards the direction of the fixing member, the step portion is formed by extending one end, close to the protruding portion, of the arm body portion outwards along the extending direction of the protruding portion, and a through hole is formed in the step portion.

Preferably, the sample stage further comprises a rod body part, one end of the rod body part is provided with a cap body, the circumferential surface of the other end of the cap body is provided with external threads, the rod body part is screwed into the threaded hole of the step part after passing through the through hole, and the periphery of the cap body and the step part section of the rod body part is sleeved with a spring.

Preferably, the surface of the cap body is provided with a protrusion.

Preferably, the clamping surface of the fixing piece is provided with an opening at a first end position, and the arm body of the moving piece is provided with a protrusion at a corresponding position.

Compared with the prior art, the utility model has the beneficial effects that:

according to the imaging device, the fixing piece and the moving piece are arranged on two sides of the protruding portion of the working face on the base table portion through integrated forming, the fixing piece is fixed on the working face on the base table portion through linear movement of the moving piece in a matched mode, adjustment of the distance between the fixing piece and the moving piece between two opposite clamping faces is achieved, samples adhered to two side faces of the protruding portion are clamped, and the fixing piece and the moving piece are used as conductive media of the samples, so that imaging definition is improved.

Drawings

FIG. 1 is a schematic diagram of a conventional sample stage;

FIG. 2 is a top view of a prior art sample stage;

FIG. 3 is a schematic diagram of the structure of the present utility model;

fig. 4 is a top view of the present utility model.

In the figure:

a base portion: 100,200; a protruding part: 300,400; fastening means: 500; clamping surface: 500a; and (3) a fixing piece: 501, a step of detecting a position of a base; first end: 501a; and (3) moving parts: 502; clamping part: 502a; arm body: 502b; step part: 502c; a rod body component: 503; cap body: 504; opening: 505; and (3) protruding: 506; and (3) a spring: 507.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1, a schematic structural view of a conventional SEM sample stage (hereinafter referred to as sample stage) is shown, the sample stage includes a base plate 100 and a protrusion 300, wherein the base plate 100 is a circular plate body, the thickness of the plate body, i.e. the height of the base plate 100, is approximately 5mm, while the base plate 100 has a circular working surface, the protrusion 300 (described in detail later) is integrally formed on the working surface, a tapered hole or a threaded hole (not shown in the drawings) is provided on the bottom surface of the base plate 100, so as to cooperate with an external support member (e.g. a rod body with threads at an end portion) to fix the sample stage, the protrusion 300 is further described as a rectangular block body, the protrusion 300 extends approximately along the radial direction of the working surface on the base plate 100, specifically, the protrusion 300 linearly extends from one side edge of the base plate 100 to the other side edge, i.e. the length of the protrusion 300 is approximately equal to the diameter of the working surface 100, while two end surfaces of the protrusion 300 are approximately equal to the diameter of the working surface, the protrusion 300 is approximately the width of the protrusion 300, and the top surface of the sample 300 is approximately equal to the width of the sample 300, and the top surface of the sample 300 is approximately equal to the top surface of the sample 300, and the top surface of the sample 300 is approximately 2 mm (the top surface of the sample 300 is attached to the top surface of the sample 300, the sample 300 is approximately the top surface of the sample 300 and the top surface of the sample 300 is attached to the top surface of the sample stage), one is used as a connecting medium between samples of the sample stage to fix the samples on the upper surface of the protrusion 300, and the other is used as a conductive medium between samples of the sample stage, in the actual use process, because gaps exist between the samples and the conductive adhesive, especially for the samples on two sides of the protrusion 200, the samples are not firmly adhered, and in the shooting process, because of the charging effect, imaging drift of the samples is fuzzy, and observation results are affected.

Aiming at the problems of the existing sample stage, the following sample stage is designed:

referring to fig. 3, which is a schematic structural view of a sample stage of the present application, which retains the main shapes of the base 200 and the projection 400, except that the sample stage further includes a fastening device 500, the fastening device 500 being generally made of a conductive material, for example, the fastening device 500 may be made of a single metal material or an alloy material, preferably, the fastening device 500 is made of aluminum, and particularly, the fastening device 500 includes a fixing member 501 and a moving member 501a, wherein the moving member 501a may be linearly moved in a direction away from or against the fixing member 501 and may be retained after being moved in a position, which is illustrated in fig. 4 as a top view of the sample stage, the projection 400 extends in a horizontal direction (i.e., a line a), the moving member 501a and the fixing member 501 are respectively disposed at both sides of the projection 400 and each extend in a length direction of the projection 400, the lengths of the moving member 501a and the fixing member 501 are substantially equal and are greater than the length of the protruding portion 400, that is, both ends of the moving member 501a and the fixing member 501 (i.e., both ends on the left and right in fig. 4) extend to the outside of the sample stage, and the fixing member 501 is fixed to the upper working surface of the base stage 200, that is, the fixing member 501 is fixed to the position of the working surface of the base stage 200, while both the fixing member 501 and the moving member 501a have the holding surface 500a parallel to the side surfaces of the protruding portion 400, the holding surface 500a being the surface of the fixing member 501 and the moving member 501a facing the protruding portion 400 (the holding surface 500a of the fixing member 501 is the upper surface thereof, and the working surface of the moving member 501a is the lower surface thereof, as illustrated in fig. 4), when placing a sample, the sample is first fixed to the upper surface or both side surfaces of the protruding portion 400 by the conductive adhesive, by the movement of the moving member 502, the end face of the sample is brought into contact with the holding face 500a on the fixing member 501 or the moving member 502 to further fix, and the fixing member 501 and the moving member 502 are used as the conductive medium of the sample.

Referring to fig. 4, the fixing member 501 and the moving member 501a will be further described, wherein the fixing member 501 is a substantially rectangular block, a section of the fixing member 501 extending to the outside of the bottom portion 200 is referred to as a first end portion 501a, and a screw hole is formed in the clamping surface 500a of the fixing member 501 at the position of the first end portion 501a; the moving member 501a includes a clamping portion 502a, an arm portion 502b, and a step 502c, wherein the clamping portion 502a is a rectangular block extending along the length direction of the protruding portion 400, and the length of the rectangular block is slightly greater than the length of the protruding portion 400, the arm portion 502b is formed by extending two ends of the clamping portion 502a toward the protruding portion 400, the step 502c is formed by one end of the arm portion 502b, which is close to the fixing member 501, along the length direction of the protruding portion 400, and a through hole for the threaded rod body to pass through is formed in the step 502c; further, the fastening device 500 further includes two rod members 503, one end of each rod member 503 is provided with a cap 504, preferably, an outer surface of the cap 504 is provided with a protrusion 506 to increase friction force during rotation, meanwhile, the rod member 503 is provided with an external thread on a circumferential outer surface of the other end of the cap 504, which is matched with the threaded hole, and a length of a section covered with the external thread in the rod member 503 is at least greater than a depth of the threaded hole, meanwhile, the rod member 503 is sleeved with a spring 507 outside a section of the step 502c and the cap 504, and a space between the moving member 501a and the fixing member 501 is adjusted by means of rotation of the rod member 503 and elasticity of the spring 507.

Further, the clamping surface 500a of the fixing member 501 has an opening 505 at the first end 501a, and the arm 502b of the moving member 501a has a protrusion 506 corresponding to the opening 505 on the side facing the fixing member 501.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. An SEM sample stage, characterized by: comprising the following steps:

a base portion;

2. A SEM sample stage according to claim 1, wherein: the fixed part and the movable part are both made of metal materials.

3. A SEM sample stage according to claim 1, wherein: the fixing piece and the movable material are aluminum.

4. A SEM sample stage according to claim 1, wherein: the bottom table part is a circular table body, and the protruding part extends along the diameter direction of the upper working surface of the bottom table part.

5. The SEM sample stage according to claim 4, wherein: the length of the fixed part and the length of the movable part are both larger than those of the protruding part, and the two ends of the fixed part and the movable part extend to the outside of the upper working surface of the bottom table part.

6. The SEM sample stage according to claim 5, wherein: the fixing piece is a rectangular block extending along the length direction of the protruding portion, and the working face of the fixing piece is provided with a threaded hole at the first end position.

7. The SEM sample stage according to claim 6, wherein: the moving part comprises a clamping part, an arm body part and a step part, wherein the clamping part extends along the length direction of the protruding part, the arm body part is formed by extending two ends of the clamping part towards the direction of the fixing part, the step part is formed by extending one end, close to the protruding part, of the arm body part outwards along the extending direction of the protruding part, and a through hole is formed in the step part.

8. The SEM sample stage according to claim 7, wherein: the sample stage further comprises a rod body part, one end of the rod body part is provided with a cap body, the circumferential surface of the other end of the cap body is provided with external threads, the rod body part is screwed into the threaded hole of the step part after passing through the through hole, and the periphery of the cap body and the step part section of the rod body part is sleeved with a spring.

9. The SEM sample stage according to claim 8, wherein: the surface of the cap body is provided with a bulge.

10. A SEM sample stage according to claim 9, wherein: the clamping surface of the fixing piece is provided with an opening at the first end position, and the arm body of the moving piece is provided with a bulge at the corresponding position.