JPH034457U - - Google Patents

Info

Publication number
JPH034457U
JPH034457U JP6250989U JP6250989U JPH034457U JP H034457 U JPH034457 U JP H034457U JP 6250989 U JP6250989 U JP 6250989U JP 6250989 U JP6250989 U JP 6250989U JP H034457 U JPH034457 U JP H034457U
Authority
JP
Japan
Prior art keywords
holder
sample
sample holder
electron microscope
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6250989U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6250989U priority Critical patent/JPH034457U/ja
Publication of JPH034457U publication Critical patent/JPH034457U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は試料観察時の試料ホールダの向きと試
料搭載の状態断面図、第2図は第1図を輪切りし
た断面図、第3図は第1図を180°回転して、
試料搭載時の状態図を示す。 1…ホールダ軸、2…観察窓、2a…観察窓、
3溝、4…試料受、5…連結軸、6…押しばね、
7,7′…押しねじ、8…試料、9…V字形溝、
10…止めねじ、11…切欠穴、12…板ばね。
Figure 1 is a cross-sectional view of the orientation of the sample holder and the state of sample loading during sample observation, Figure 2 is a cross-sectional view of Figure 1, and Figure 3 is a 180° rotation of Figure 1.
A diagram of the state when the sample is loaded is shown. 1...Holder shaft, 2...Observation window, 2a...Observation window,
3 groove, 4...sample holder, 5...connection shaft, 6...push spring,
7, 7′...Push screw, 8...Sample, 9...V-shaped groove,
10... Set screw, 11... Notch hole, 12... Leaf spring.

Claims (1)

【実用新案登録請求の範囲】 (1) 試料ホールダ先端部に試料搭載機構を有し
た電子顕微鏡用サイドエントリー試料ステージの
バルク試料ホールダにおいて、ホールダ軸側面か
ら水平方向に、少なくともホールダ軸中心より深
い溝を施し、該溝に出し入れする試料受を設けた
ことを特徴とする電子顕微鏡用バルク試料ホール
ダ。 (2) 請求の範囲第1項において、前記溝内に試
料受を、連結軸で支持して回転出し入れすること
を特徴とする電子顕微鏡用バルク試料ホールダ。 (3) 請求の範囲第1項において、前記試料受は
、試料観察窓を設けて、ホールダ軸にある試料観
察窓と向き合つて密接し、該密接面の反対面はホ
ールダ軸中心と同等位置に構成し、さらに該試料
受の少なくとも一方には側壁を設けたことを特徴
とする電子顕微鏡用バルク試料ホールダ。 (4) 請求の範囲第2項において、前記試料受は
、連結軸支持側と反対の端面に凹みを設け、また
、ホールダ軸は押しばねを溝内に突き出して、該
凹みと組み合わせたことを特徴とする電子顕微鏡
用バルク試料ホールダ。 (5) 請求の範囲第1項または第3項において、
ホールダ軸下面(試料観察窓と反対側)から該溝
に突き抜けた押しねじを設けたことを特徴とする
電子顕微鏡用バルク試料ホールダ。
[Scope of Claim for Utility Model Registration] (1) In a bulk sample holder of a side entry sample stage for an electron microscope that has a sample mounting mechanism at the tip of the sample holder, a groove extending horizontally from the side of the holder axis and deeper than the center of the holder axis at least. What is claimed is: 1. A bulk sample holder for an electron microscope, characterized in that the sample holder is provided with a sample holder for loading and unloading the sample into the groove. (2) The bulk sample holder for an electron microscope according to claim 1, characterized in that a sample holder is supported in the groove by a connecting shaft and rotated in and out. (3) In claim 1, the sample holder is provided with a sample observation window, facing and in close contact with the sample observation window on the holder axis, and the opposite surface of the close contact surface is located at the same position as the center of the holder axis. 1. A bulk sample holder for an electron microscope, further comprising a side wall on at least one of the sample holders. (4) In claim 2, the sample holder is provided with a recess on the end face opposite to the connecting shaft support side, and the holder shaft has a pressure spring protruding into the groove and combined with the recess. Features: Bulk sample holder for electron microscopes. (5) In claim 1 or 3,
A bulk sample holder for an electron microscope, characterized in that a push screw is provided that penetrates into the groove from the lower surface of the holder shaft (on the side opposite to the sample observation window).
JP6250989U 1989-05-31 1989-05-31 Pending JPH034457U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6250989U JPH034457U (en) 1989-05-31 1989-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6250989U JPH034457U (en) 1989-05-31 1989-05-31

Publications (1)

Publication Number Publication Date
JPH034457U true JPH034457U (en) 1991-01-17

Family

ID=31591724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6250989U Pending JPH034457U (en) 1989-05-31 1989-05-31

Country Status (1)

Country Link
JP (1) JPH034457U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005522833A (en) * 2002-04-08 2005-07-28 イー エイ フィシオネ インストルメンツ インコーポレーテッド Sample holder
JP2010056078A (en) * 2008-07-28 2010-03-11 Hitachi High-Technologies Corp Sample holder for charged particle beam device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005522833A (en) * 2002-04-08 2005-07-28 イー エイ フィシオネ インストルメンツ インコーポレーテッド Sample holder
JP2010056078A (en) * 2008-07-28 2010-03-11 Hitachi High-Technologies Corp Sample holder for charged particle beam device

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