JPH0370903B2 - - Google Patents

Info

Publication number
JPH0370903B2
JPH0370903B2 JP59221199A JP22119984A JPH0370903B2 JP H0370903 B2 JPH0370903 B2 JP H0370903B2 JP 59221199 A JP59221199 A JP 59221199A JP 22119984 A JP22119984 A JP 22119984A JP H0370903 B2 JPH0370903 B2 JP H0370903B2
Authority
JP
Japan
Prior art keywords
inspection
wafer
inspection item
element position
defective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59221199A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61100941A (ja
Inventor
Kunio Matsumoto
Yoshuki Nakagome
Masaru Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59221199A priority Critical patent/JPS61100941A/ja
Publication of JPS61100941A publication Critical patent/JPS61100941A/ja
Publication of JPH0370903B2 publication Critical patent/JPH0370903B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP59221199A 1984-10-23 1984-10-23 半導体素子の検査データ分析装置 Granted JPS61100941A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59221199A JPS61100941A (ja) 1984-10-23 1984-10-23 半導体素子の検査データ分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59221199A JPS61100941A (ja) 1984-10-23 1984-10-23 半導体素子の検査データ分析装置

Publications (2)

Publication Number Publication Date
JPS61100941A JPS61100941A (ja) 1986-05-19
JPH0370903B2 true JPH0370903B2 (enExample) 1991-11-11

Family

ID=16763020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59221199A Granted JPS61100941A (ja) 1984-10-23 1984-10-23 半導体素子の検査データ分析装置

Country Status (1)

Country Link
JP (1) JPS61100941A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0814601B2 (ja) * 1987-12-25 1996-02-14 東京エレクトロン株式会社 テープキャリヤの検査装置
US5240866A (en) * 1992-02-03 1993-08-31 At&T Bell Laboratories Method for characterizing failed circuits on semiconductor wafers
KR100499163B1 (ko) * 1997-12-11 2005-09-30 삼성전자주식회사 웨이퍼 디펙트 분류 방법
JPH11243041A (ja) * 1998-02-26 1999-09-07 Mitsubishi Electric Corp 品質管理システムおよび記録媒体
CN107037345B (zh) * 2016-02-02 2019-09-17 上海和辉光电有限公司 晶圆测试时自我检测的方法及其晶圆测试制具

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53104168A (en) * 1977-02-23 1978-09-11 Hitachi Ltd Semiconductor pellet bonding method
JPS58165337A (ja) * 1982-03-26 1983-09-30 Hitachi Ltd 半導体製造プラントにおける不良解析方法

Also Published As

Publication number Publication date
JPS61100941A (ja) 1986-05-19

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Legal Events

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EXPY Cancellation because of completion of term