JPH0369853U - - Google Patents
Info
- Publication number
- JPH0369853U JPH0369853U JP13118189U JP13118189U JPH0369853U JP H0369853 U JPH0369853 U JP H0369853U JP 13118189 U JP13118189 U JP 13118189U JP 13118189 U JP13118189 U JP 13118189U JP H0369853 U JPH0369853 U JP H0369853U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron microscope
- scanning electron
- electron detector
- secondary electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13118189U JPH0369853U (un) | 1989-11-10 | 1989-11-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13118189U JPH0369853U (un) | 1989-11-10 | 1989-11-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0369853U true JPH0369853U (un) | 1991-07-11 |
Family
ID=31678704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13118189U Pending JPH0369853U (un) | 1989-11-10 | 1989-11-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0369853U (un) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009026750A (ja) * | 2007-06-18 | 2009-02-05 | Fei Co | チャンバ内電子検出器 |
KR101406834B1 (ko) * | 2011-10-21 | 2014-06-18 | (주)블루이엔지 | 스큐를 조절할 수 있는 번인 테스트 장치 및 그 제어 방법 |
-
1989
- 1989-11-10 JP JP13118189U patent/JPH0369853U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009026750A (ja) * | 2007-06-18 | 2009-02-05 | Fei Co | チャンバ内電子検出器 |
KR101406834B1 (ko) * | 2011-10-21 | 2014-06-18 | (주)블루이엔지 | 스큐를 조절할 수 있는 번인 테스트 장치 및 그 제어 방법 |
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