JPH0368759A - 薄膜形成装置 - Google Patents
薄膜形成装置Info
- Publication number
- JPH0368759A JPH0368759A JP1043757A JP4375789A JPH0368759A JP H0368759 A JPH0368759 A JP H0368759A JP 1043757 A JP1043757 A JP 1043757A JP 4375789 A JP4375789 A JP 4375789A JP H0368759 A JPH0368759 A JP H0368759A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- boat
- thin film
- evaporation
- deposit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 17
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000010438 heat treatment Methods 0.000 claims description 13
- 230000008021 deposition Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 9
- 230000003287 optical effect Effects 0.000 abstract description 4
- 238000007740 vapor deposition Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 description 30
- 230000008020 evaporation Effects 0.000 description 29
- 239000010408 film Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 5
- FPHIOHCCQGUGKU-UHFFFAOYSA-L difluorolead Chemical compound F[Pb]F FPHIOHCCQGUGKU-UHFFFAOYSA-L 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1043757A JPH0368759A (ja) | 1989-02-23 | 1989-02-23 | 薄膜形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1043757A JPH0368759A (ja) | 1989-02-23 | 1989-02-23 | 薄膜形成装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57222415A Division JPS59113174A (ja) | 1982-12-17 | 1982-12-17 | 薄膜形成方法および薄膜形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0368759A true JPH0368759A (ja) | 1991-03-25 |
| JPH0477071B2 JPH0477071B2 (enrdf_load_stackoverflow) | 1992-12-07 |
Family
ID=12672634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1043757A Granted JPH0368759A (ja) | 1989-02-23 | 1989-02-23 | 薄膜形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0368759A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008255465A (ja) * | 2007-03-15 | 2008-10-23 | Nippon Steel Materials Co Ltd | 一酸化珪素蒸着材料の製造方法およびその製造装置 |
-
1989
- 1989-02-23 JP JP1043757A patent/JPH0368759A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008255465A (ja) * | 2007-03-15 | 2008-10-23 | Nippon Steel Materials Co Ltd | 一酸化珪素蒸着材料の製造方法およびその製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0477071B2 (enrdf_load_stackoverflow) | 1992-12-07 |
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