JPS6233280Y2 - - Google Patents
Info
- Publication number
- JPS6233280Y2 JPS6233280Y2 JP13832181U JP13832181U JPS6233280Y2 JP S6233280 Y2 JPS6233280 Y2 JP S6233280Y2 JP 13832181 U JP13832181 U JP 13832181U JP 13832181 U JP13832181 U JP 13832181U JP S6233280 Y2 JPS6233280 Y2 JP S6233280Y2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- opening
- source chamber
- source
- end surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 210000004027 cell Anatomy 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 210000001787 dendrite Anatomy 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832181U JPS5843940U (ja) | 1981-09-17 | 1981-09-17 | 分子線蒸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13832181U JPS5843940U (ja) | 1981-09-17 | 1981-09-17 | 分子線蒸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5843940U JPS5843940U (ja) | 1983-03-24 |
| JPS6233280Y2 true JPS6233280Y2 (enrdf_load_stackoverflow) | 1987-08-25 |
Family
ID=29931549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13832181U Granted JPS5843940U (ja) | 1981-09-17 | 1981-09-17 | 分子線蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5843940U (enrdf_load_stackoverflow) |
-
1981
- 1981-09-17 JP JP13832181U patent/JPS5843940U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5843940U (ja) | 1983-03-24 |
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