JPH0367817A - 超音波浮上型搬送方法 - Google Patents

超音波浮上型搬送方法

Info

Publication number
JPH0367817A
JPH0367817A JP2054362A JP5436290A JPH0367817A JP H0367817 A JPH0367817 A JP H0367817A JP 2054362 A JP2054362 A JP 2054362A JP 5436290 A JP5436290 A JP 5436290A JP H0367817 A JPH0367817 A JP H0367817A
Authority
JP
Japan
Prior art keywords
ultrasonic
ultrasonic wave
conveyance
conveyed
amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2054362A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0369812B2 (enExample
Inventor
Teruo Asakawa
輝雄 浅川
Kazunari Imahashi
今橋　一成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2054362A priority Critical patent/JPH0367817A/ja
Publication of JPH0367817A publication Critical patent/JPH0367817A/ja
Publication of JPH0369812B2 publication Critical patent/JPH0369812B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Non-Mechanical Conveyors (AREA)
JP2054362A 1990-03-06 1990-03-06 超音波浮上型搬送方法 Granted JPH0367817A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2054362A JPH0367817A (ja) 1990-03-06 1990-03-06 超音波浮上型搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2054362A JPH0367817A (ja) 1990-03-06 1990-03-06 超音波浮上型搬送方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15308582A Division JPS5943724A (ja) 1982-09-02 1982-09-02 超音波浮上型搬送装置

Publications (2)

Publication Number Publication Date
JPH0367817A true JPH0367817A (ja) 1991-03-22
JPH0369812B2 JPH0369812B2 (enExample) 1991-11-05

Family

ID=12968537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2054362A Granted JPH0367817A (ja) 1990-03-06 1990-03-06 超音波浮上型搬送方法

Country Status (1)

Country Link
JP (1) JPH0367817A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH098097A (ja) * 1995-06-15 1997-01-10 Kaijo Corp 物体浮揚装置及びこれを具備した物体搬送装置
JP2014052332A (ja) * 2012-09-10 2014-03-20 Tokyo Institute Of Technology 非接触液滴分注装置及び非接触液滴分注方法
KR20150043667A (ko) * 2013-10-15 2015-04-23 주식회사 케이씨텍 기판 처리 장치
CN107818938A (zh) * 2016-09-13 2018-03-20 台湾积体电路制造股份有限公司 运送系统及运送加工元件的方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101515806B1 (ko) * 2013-11-04 2015-05-04 코닝정밀소재 주식회사 시트 제조방법 및 제조장치
KR101515807B1 (ko) * 2013-11-04 2015-05-07 코닝정밀소재 주식회사 롤 제조방법 및 제조장치

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH098097A (ja) * 1995-06-15 1997-01-10 Kaijo Corp 物体浮揚装置及びこれを具備した物体搬送装置
JP2014052332A (ja) * 2012-09-10 2014-03-20 Tokyo Institute Of Technology 非接触液滴分注装置及び非接触液滴分注方法
KR20150043667A (ko) * 2013-10-15 2015-04-23 주식회사 케이씨텍 기판 처리 장치
CN107818938A (zh) * 2016-09-13 2018-03-20 台湾积体电路制造股份有限公司 运送系统及运送加工元件的方法
CN107818938B (zh) * 2016-09-13 2021-07-30 台湾积体电路制造股份有限公司 运送系统及运送加工元件的方法

Also Published As

Publication number Publication date
JPH0369812B2 (enExample) 1991-11-05

Similar Documents

Publication Publication Date Title
ES2169256T3 (es) Aparato para transferir objetos de una primera a una segunda cinta transportadora.
EP0054899B1 (en) Air film conveyor for transporting semiconductor chips
ATE296251T1 (de) Fördermodul mit gewölbtem mitnehmer
DE50010781D1 (de) Schweissdrahtfördereinrichtung mit haupt- und hilfsantrieb
JPH0367817A (ja) 超音波浮上型搬送方法
KR880010997A (ko) 웨이퍼 반송방법 및 장치
JPH0250012B2 (enExample)
JPS6082524A (ja) ベルト式分岐合流装置
JPH0319136B2 (enExample)
JP5793943B2 (ja) 物品分別搬送装置
JP3552793B2 (ja) 物体搬送装置
JPH028121A (ja) ウエハ搬送装置
US20100006394A1 (en) Transitions between conveyance paths
DE60213148D1 (de) Vorrichtung zum Formen eines Stapels von Artikellagen
JP2003040421A (ja) 物体搬送装置
JP3393660B2 (ja) 搬送装置
JPS61291319A (ja) 空気圧利用による部品搬送装置
Mural et al. Optimization of a Non-Contact Air Conveyor: An Experimental Study
JP2025029630A (ja) 搬送物の姿勢変換方法及び姿勢変換機構、並びに、搬送装置
JPH03288724A (ja) 磁気浮上搬送装置
JPS5982222A (ja) ウエ−ハ搬送装置
JPS6463Y2 (enExample)
JPH01133840A (ja) 搬送装置
JPS63202204A (ja) 磁気浮上型搬送装置
JPS62171820A (ja) ワ−ク等の搬送装置