JPH0366941B2 - - Google Patents
Info
- Publication number
- JPH0366941B2 JPH0366941B2 JP14544186A JP14544186A JPH0366941B2 JP H0366941 B2 JPH0366941 B2 JP H0366941B2 JP 14544186 A JP14544186 A JP 14544186A JP 14544186 A JP14544186 A JP 14544186A JP H0366941 B2 JPH0366941 B2 JP H0366941B2
- Authority
- JP
- Japan
- Prior art keywords
- processing
- processing chamber
- pallet
- transport device
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000032258 transport Effects 0.000 claims description 33
- 239000007788 liquid Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 5
- 239000003973 paint Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14544186A JPS631625A (ja) | 1986-06-20 | 1986-06-20 | 処理部の搬送方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14544186A JPS631625A (ja) | 1986-06-20 | 1986-06-20 | 処理部の搬送方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS631625A JPS631625A (ja) | 1988-01-06 |
| JPH0366941B2 true JPH0366941B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-10-21 |
Family
ID=15385311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14544186A Granted JPS631625A (ja) | 1986-06-20 | 1986-06-20 | 処理部の搬送方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS631625A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1986
- 1986-06-20 JP JP14544186A patent/JPS631625A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS631625A (ja) | 1988-01-06 |