JPH0366576B2 - - Google Patents
Info
- Publication number
- JPH0366576B2 JPH0366576B2 JP61096462A JP9646286A JPH0366576B2 JP H0366576 B2 JPH0366576 B2 JP H0366576B2 JP 61096462 A JP61096462 A JP 61096462A JP 9646286 A JP9646286 A JP 9646286A JP H0366576 B2 JPH0366576 B2 JP H0366576B2
- Authority
- JP
- Japan
- Prior art keywords
- filter device
- clean room
- filter
- ceiling
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007664 blowing Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9646286A JPS62252840A (ja) | 1986-04-24 | 1986-04-24 | 筒状のフィルタ装置利用のクリ−ンル−ム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9646286A JPS62252840A (ja) | 1986-04-24 | 1986-04-24 | 筒状のフィルタ装置利用のクリ−ンル−ム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62252840A JPS62252840A (ja) | 1987-11-04 |
| JPH0366576B2 true JPH0366576B2 (US06312121-20011106-C00033.png) | 1991-10-17 |
Family
ID=14165695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9646286A Granted JPS62252840A (ja) | 1986-04-24 | 1986-04-24 | 筒状のフィルタ装置利用のクリ−ンル−ム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62252840A (US06312121-20011106-C00033.png) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2537247B2 (ja) * | 1987-01-28 | 1996-09-25 | 三機工業株式会社 | クリ―ンル―ム |
| JPH061221Y2 (ja) * | 1988-01-22 | 1994-01-12 | ソニー株式会社 | 清浄空気吹出ユニット |
| WO2023089643A1 (en) * | 2021-11-19 | 2023-05-25 | Convertini Martino | Natural aeration device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60223945A (ja) * | 1984-04-21 | 1985-11-08 | Shinryo Air Conditioning Co Ltd | クリ−ンル−ム用吹出口構造 |
-
1986
- 1986-04-24 JP JP9646286A patent/JPS62252840A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60223945A (ja) * | 1984-04-21 | 1985-11-08 | Shinryo Air Conditioning Co Ltd | クリ−ンル−ム用吹出口構造 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62252840A (ja) | 1987-11-04 |
