JPH0362977B2 - - Google Patents

Info

Publication number
JPH0362977B2
JPH0362977B2 JP61261193A JP26119386A JPH0362977B2 JP H0362977 B2 JPH0362977 B2 JP H0362977B2 JP 61261193 A JP61261193 A JP 61261193A JP 26119386 A JP26119386 A JP 26119386A JP H0362977 B2 JPH0362977 B2 JP H0362977B2
Authority
JP
Japan
Prior art keywords
clean room
unit
air conditioning
conditioning control
ceiling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61261193A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63116037A (ja
Inventor
Shoji Hirayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirayama Setsubi KK
Original Assignee
Hirayama Setsubi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirayama Setsubi KK filed Critical Hirayama Setsubi KK
Priority to JP26119386A priority Critical patent/JPS63116037A/ja
Publication of JPS63116037A publication Critical patent/JPS63116037A/ja
Publication of JPH0362977B2 publication Critical patent/JPH0362977B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP26119386A 1986-11-03 1986-11-03 クリーンルームシステム用ユニット Granted JPS63116037A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26119386A JPS63116037A (ja) 1986-11-03 1986-11-03 クリーンルームシステム用ユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26119386A JPS63116037A (ja) 1986-11-03 1986-11-03 クリーンルームシステム用ユニット

Publications (2)

Publication Number Publication Date
JPS63116037A JPS63116037A (ja) 1988-05-20
JPH0362977B2 true JPH0362977B2 (enrdf_load_html_response) 1991-09-27

Family

ID=17358435

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26119386A Granted JPS63116037A (ja) 1986-11-03 1986-11-03 クリーンルームシステム用ユニット

Country Status (1)

Country Link
JP (1) JPS63116037A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117840A (ja) * 1989-09-29 1991-05-20 S B Plant:Kk クリーンルーム
WO2024166344A1 (ja) * 2023-02-10 2024-08-15 日立グローバルライフソリューションズ株式会社 クリーンルーム施設

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243238A (ja) * 1985-04-18 1986-10-29 Matsushita Seiko Co Ltd 空気清浄装置

Also Published As

Publication number Publication date
JPS63116037A (ja) 1988-05-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees