JPH0360150B2 - - Google Patents
Info
- Publication number
- JPH0360150B2 JPH0360150B2 JP58021242A JP2124283A JPH0360150B2 JP H0360150 B2 JPH0360150 B2 JP H0360150B2 JP 58021242 A JP58021242 A JP 58021242A JP 2124283 A JP2124283 A JP 2124283A JP H0360150 B2 JPH0360150 B2 JP H0360150B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- rotation
- scanning
- bright line
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 41
- 238000010894 electron beam technology Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58021242A JPS59148255A (ja) | 1983-02-10 | 1983-02-10 | 走査電子顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58021242A JPS59148255A (ja) | 1983-02-10 | 1983-02-10 | 走査電子顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59148255A JPS59148255A (ja) | 1984-08-24 |
| JPH0360150B2 true JPH0360150B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-09-12 |
Family
ID=12049579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58021242A Granted JPS59148255A (ja) | 1983-02-10 | 1983-02-10 | 走査電子顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59148255A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61104549A (ja) * | 1984-10-29 | 1986-05-22 | Jeol Ltd | 電子顕微鏡 |
| TWI697381B (zh) | 2013-03-06 | 2020-07-01 | 美商Ｗｔｏ股份有限公司 | 用於切割工具的渦輪驅動動力單元 |
-
1983
- 1983-02-10 JP JP58021242A patent/JPS59148255A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59148255A (ja) | 1984-08-24 |