JPH0359581B2 - - Google Patents

Info

Publication number
JPH0359581B2
JPH0359581B2 JP62125192A JP12519287A JPH0359581B2 JP H0359581 B2 JPH0359581 B2 JP H0359581B2 JP 62125192 A JP62125192 A JP 62125192A JP 12519287 A JP12519287 A JP 12519287A JP H0359581 B2 JPH0359581 B2 JP H0359581B2
Authority
JP
Japan
Prior art keywords
wafer
wafers
wafer holder
rods
lid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62125192A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63260047A (ja
Inventor
Akira Uehara
Isamu Hijikata
Hisashi Nakane
Muneo Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP62125192A priority Critical patent/JPS63260047A/ja
Publication of JPS63260047A publication Critical patent/JPS63260047A/ja
Publication of JPH0359581B2 publication Critical patent/JPH0359581B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
JP62125192A 1987-05-22 1987-05-22 ウエハ−保持体 Granted JPS63260047A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62125192A JPS63260047A (ja) 1987-05-22 1987-05-22 ウエハ−保持体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62125192A JPS63260047A (ja) 1987-05-22 1987-05-22 ウエハ−保持体

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15928181A Division JPS5860552A (ja) 1981-10-05 1981-10-05 縦型自動プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS63260047A JPS63260047A (ja) 1988-10-27
JPH0359581B2 true JPH0359581B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-09-11

Family

ID=14904194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62125192A Granted JPS63260047A (ja) 1987-05-22 1987-05-22 ウエハ−保持体

Country Status (1)

Country Link
JP (1) JPS63260047A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06177073A (ja) * 1992-12-07 1994-06-24 Nippon Ee S M Kk エッチング装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860552A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置
JPS6279646A (ja) * 1985-10-02 1987-04-13 Oki Electric Ind Co Ltd ウエハ移載装置

Also Published As

Publication number Publication date
JPS63260047A (ja) 1988-10-27

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