JPH0358533B2 - - Google Patents

Info

Publication number
JPH0358533B2
JPH0358533B2 JP6493689A JP6493689A JPH0358533B2 JP H0358533 B2 JPH0358533 B2 JP H0358533B2 JP 6493689 A JP6493689 A JP 6493689A JP 6493689 A JP6493689 A JP 6493689A JP H0358533 B2 JPH0358533 B2 JP H0358533B2
Authority
JP
Japan
Prior art keywords
gate electrode
shot
ion implantation
drain region
source region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6493689A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249434A (ja
Inventor
Naoki Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6493689A priority Critical patent/JPH0249434A/ja
Publication of JPH0249434A publication Critical patent/JPH0249434A/ja
Publication of JPH0358533B2 publication Critical patent/JPH0358533B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP6493689A 1989-03-18 1989-03-18 半導体装置の製造方法 Granted JPH0249434A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6493689A JPH0249434A (ja) 1989-03-18 1989-03-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6493689A JPH0249434A (ja) 1989-03-18 1989-03-18 半導体装置の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP55189544A Division JPS57113289A (en) 1980-12-30 1980-12-30 Semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPH0249434A JPH0249434A (ja) 1990-02-19
JPH0358533B2 true JPH0358533B2 (enrdf_load_stackoverflow) 1991-09-05

Family

ID=13272415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6493689A Granted JPH0249434A (ja) 1989-03-18 1989-03-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPH0249434A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0249434A (ja) 1990-02-19

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