JPH0355975B2 - - Google Patents

Info

Publication number
JPH0355975B2
JPH0355975B2 JP56209540A JP20954081A JPH0355975B2 JP H0355975 B2 JPH0355975 B2 JP H0355975B2 JP 56209540 A JP56209540 A JP 56209540A JP 20954081 A JP20954081 A JP 20954081A JP H0355975 B2 JPH0355975 B2 JP H0355975B2
Authority
JP
Japan
Prior art keywords
electron beam
silicon
silicon layer
electron
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56209540A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58112323A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP56209540A priority Critical patent/JPS58112323A/ja
Publication of JPS58112323A publication Critical patent/JPS58112323A/ja
Publication of JPH0355975B2 publication Critical patent/JPH0355975B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/90—

Landscapes

  • Recrystallisation Techniques (AREA)
JP56209540A 1981-12-26 1981-12-26 電子ビ−ムアニ−ル方法 Granted JPS58112323A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56209540A JPS58112323A (ja) 1981-12-26 1981-12-26 電子ビ−ムアニ−ル方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56209540A JPS58112323A (ja) 1981-12-26 1981-12-26 電子ビ−ムアニ−ル方法

Publications (2)

Publication Number Publication Date
JPS58112323A JPS58112323A (ja) 1983-07-04
JPH0355975B2 true JPH0355975B2 (Direct) 1991-08-27

Family

ID=16574492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56209540A Granted JPS58112323A (ja) 1981-12-26 1981-12-26 電子ビ−ムアニ−ル方法

Country Status (1)

Country Link
JP (1) JPS58112323A (Direct)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59178719A (ja) * 1983-03-30 1984-10-11 Agency Of Ind Science & Technol 電子ビームアニール方法
JP2542928Y2 (ja) * 1989-10-27 1997-07-30 日本電気アイシーマイコンシステム株式会社 マスタスライス半導体装置
JP2002110688A (ja) * 2000-09-29 2002-04-12 Canon Inc Ｓｏｉの熱処理方法及び製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142630A (en) * 1980-04-09 1981-11-07 Fujitsu Ltd Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPS58112323A (ja) 1983-07-04

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