JPH0355974B2 - - Google Patents
Info
- Publication number
- JPH0355974B2 JPH0355974B2 JP22838582A JP22838582A JPH0355974B2 JP H0355974 B2 JPH0355974 B2 JP H0355974B2 JP 22838582 A JP22838582 A JP 22838582A JP 22838582 A JP22838582 A JP 22838582A JP H0355974 B2 JPH0355974 B2 JP H0355974B2
- Authority
- JP
- Japan
- Prior art keywords
- dry plate
- hard dry
- hard
- stand
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 description 29
- 239000007789 gas Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 7
- 239000011651 chromium Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57228385A JPS59119355A (ja) | 1982-12-27 | 1982-12-27 | 露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57228385A JPS59119355A (ja) | 1982-12-27 | 1982-12-27 | 露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59119355A JPS59119355A (ja) | 1984-07-10 |
| JPH0355974B2 true JPH0355974B2 (OSRAM) | 1991-08-27 |
Family
ID=16875634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57228385A Granted JPS59119355A (ja) | 1982-12-27 | 1982-12-27 | 露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59119355A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018087428A1 (en) | 2016-11-08 | 2018-05-17 | Woodio Oy | Compressed articles and methods of manufacturing the same |
| WO2020058579A1 (en) | 2018-09-21 | 2020-03-26 | Woodio Oy | Method of manufacturing moulded articles |
-
1982
- 1982-12-27 JP JP57228385A patent/JPS59119355A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018087428A1 (en) | 2016-11-08 | 2018-05-17 | Woodio Oy | Compressed articles and methods of manufacturing the same |
| WO2020058579A1 (en) | 2018-09-21 | 2020-03-26 | Woodio Oy | Method of manufacturing moulded articles |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59119355A (ja) | 1984-07-10 |
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