JPH0354831Y2 - - Google Patents
Info
- Publication number
- JPH0354831Y2 JPH0354831Y2 JP1168088U JP1168088U JPH0354831Y2 JP H0354831 Y2 JPH0354831 Y2 JP H0354831Y2 JP 1168088 U JP1168088 U JP 1168088U JP 1168088 U JP1168088 U JP 1168088U JP H0354831 Y2 JPH0354831 Y2 JP H0354831Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- gap
- ball screw
- main body
- body frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 239000011810 insulating material Substances 0.000 claims description 5
- 230000002265 prevention Effects 0.000 claims description 3
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Transmission Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1168088U JPH0354831Y2 (OSRAM) | 1988-01-30 | 1988-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1168088U JPH0354831Y2 (OSRAM) | 1988-01-30 | 1988-01-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01117847U JPH01117847U (OSRAM) | 1989-08-09 |
| JPH0354831Y2 true JPH0354831Y2 (OSRAM) | 1991-12-04 |
Family
ID=31220448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1168088U Expired JPH0354831Y2 (OSRAM) | 1988-01-30 | 1988-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0354831Y2 (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09253975A (ja) * | 1996-03-25 | 1997-09-30 | Hiroshi Nakazawa | ねじ軸の熱変形低減装置及び方法 |
| KR20150100878A (ko) | 2013-01-25 | 2015-09-02 | 닛본 세이고 가부시끼가이샤 | 볼 나사 장치 |
| JP2021085410A (ja) * | 2019-11-25 | 2021-06-03 | 日本電子株式会社 | アクチュエーター、試料位置決め装置、および荷電粒子線装置 |
-
1988
- 1988-01-30 JP JP1168088U patent/JPH0354831Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01117847U (OSRAM) | 1989-08-09 |
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