JPH0354339Y2 - - Google Patents
Info
- Publication number
- JPH0354339Y2 JPH0354339Y2 JP4267487U JP4267487U JPH0354339Y2 JP H0354339 Y2 JPH0354339 Y2 JP H0354339Y2 JP 4267487 U JP4267487 U JP 4267487U JP 4267487 U JP4267487 U JP 4267487U JP H0354339 Y2 JPH0354339 Y2 JP H0354339Y2
- Authority
- JP
- Japan
- Prior art keywords
- frame
- perforated plate
- air
- surrounding
- air filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007664 blowing Methods 0.000 claims description 31
- 230000002093 peripheral effect Effects 0.000 description 11
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Filtering Of Dispersed Particles In Gases (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4267487U JPH0354339Y2 (fr) | 1987-03-25 | 1987-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4267487U JPH0354339Y2 (fr) | 1987-03-25 | 1987-03-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63150236U JPS63150236U (fr) | 1988-10-03 |
| JPH0354339Y2 true JPH0354339Y2 (fr) | 1991-11-29 |
Family
ID=30858812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4267487U Expired JPH0354339Y2 (fr) | 1987-03-25 | 1987-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0354339Y2 (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4473931B1 (ja) * | 2009-03-27 | 2010-06-02 | 近藤工業株式会社 | 解剖台におけるホルムアルデヒド拡散防止装置 |
| JP6554414B2 (ja) * | 2015-12-25 | 2019-07-31 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置 |
-
1987
- 1987-03-25 JP JP4267487U patent/JPH0354339Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63150236U (fr) | 1988-10-03 |
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