JPH0353769B2 - - Google Patents

Info

Publication number
JPH0353769B2
JPH0353769B2 JP14673885A JP14673885A JPH0353769B2 JP H0353769 B2 JPH0353769 B2 JP H0353769B2 JP 14673885 A JP14673885 A JP 14673885A JP 14673885 A JP14673885 A JP 14673885A JP H0353769 B2 JPH0353769 B2 JP H0353769B2
Authority
JP
Japan
Prior art keywords
wafer
tape
protective tape
dimensional image
image sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14673885A
Other languages
English (en)
Japanese (ja)
Other versions
JPS628535A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14673885A priority Critical patent/JPS628535A/ja
Publication of JPS628535A publication Critical patent/JPS628535A/ja
Publication of JPH0353769B2 publication Critical patent/JPH0353769B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14673885A 1985-07-05 1985-07-05 ウエハ保護テ−プのずれ検出方法およびその装置 Granted JPS628535A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14673885A JPS628535A (ja) 1985-07-05 1985-07-05 ウエハ保護テ−プのずれ検出方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14673885A JPS628535A (ja) 1985-07-05 1985-07-05 ウエハ保護テ−プのずれ検出方法およびその装置

Publications (2)

Publication Number Publication Date
JPS628535A JPS628535A (ja) 1987-01-16
JPH0353769B2 true JPH0353769B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-16

Family

ID=15414475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14673885A Granted JPS628535A (ja) 1985-07-05 1985-07-05 ウエハ保護テ−プのずれ検出方法およびその装置

Country Status (1)

Country Link
JP (1) JPS628535A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0718624A3 (en) * 1994-12-19 1997-07-30 At & T Corp Device and method for illuminating transparent and semi-transparent materials

Also Published As

Publication number Publication date
JPS628535A (ja) 1987-01-16

Similar Documents

Publication Publication Date Title
US5125791A (en) Semiconductor object pre-aligning method
EP0358512A3 (en) Position detecting method and apparatus
JPH0353769B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH11243129A5 (ja) 半導体ウエハ位置検出装置および検査装置
JPS63280435A (ja) ウエハのプリアライメント装置
JPH04177851A (ja) ウェーハ外観検査装置
JPH10325715A (ja) 位置検出方法及び装置
JP2874795B2 (ja) オリエンテーションフラット検出装置
US4755050A (en) Standard for monitoring the calibration of an optical line width measuring machine
KR19990084235A (ko) 웨이퍼 검사 시스템
JPS62162342A (ja) ウエハの位置合せ装置
JPS62102145A (ja) 欠陥検出方法
JP2508031B2 (ja) ウエハ設置装置
JPH10173031A (ja) 円形基板位置決め装置
JP3442480B2 (ja) ウェーハ剥離装置
JP2988594B2 (ja) ウェ−ハ中心検出装置
JP2922764B2 (ja) 硬貨判別装置
JP2542930Y2 (ja) ダミーウェーハ
JPS6245039A (ja) 円形板状物体の角度位置決め装置
JPH04102400A (ja) 部品吸着検出装置
JPH09257413A (ja) 外周位置検出装置および方法
JPH06260458A (ja) ウェーハポリシュ用プレートの位置決め方法
JPS6322524B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2022088378A (ja) 貼り合せ基板の測定方法および加工方法並びにそれらに用いる装置
JPS6213617B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)