JPH0353690Y2 - - Google Patents
Info
- Publication number
- JPH0353690Y2 JPH0353690Y2 JP16374286U JP16374286U JPH0353690Y2 JP H0353690 Y2 JPH0353690 Y2 JP H0353690Y2 JP 16374286 U JP16374286 U JP 16374286U JP 16374286 U JP16374286 U JP 16374286U JP H0353690 Y2 JPH0353690 Y2 JP H0353690Y2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- pressure
- liquid
- chemical liquid
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 61
- 238000005192 partition Methods 0.000 claims description 8
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 description 55
- 239000004065 semiconductor Substances 0.000 description 22
- 238000012545 processing Methods 0.000 description 7
- 239000012530 fluid Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16374286U JPH0353690Y2 (enrdf_load_stackoverflow) | 1986-10-24 | 1986-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16374286U JPH0353690Y2 (enrdf_load_stackoverflow) | 1986-10-24 | 1986-10-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6369514U JPS6369514U (enrdf_load_stackoverflow) | 1988-05-10 |
| JPH0353690Y2 true JPH0353690Y2 (enrdf_load_stackoverflow) | 1991-11-25 |
Family
ID=31092222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16374286U Expired JPH0353690Y2 (enrdf_load_stackoverflow) | 1986-10-24 | 1986-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0353690Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008018150A (ja) * | 2006-07-14 | 2008-01-31 | Asahi:Kk | 立枠及び棚 |
-
1986
- 1986-10-24 JP JP16374286U patent/JPH0353690Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008018150A (ja) * | 2006-07-14 | 2008-01-31 | Asahi:Kk | 立枠及び棚 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6369514U (enrdf_load_stackoverflow) | 1988-05-10 |
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