JPH0352890B2 - - Google Patents

Info

Publication number
JPH0352890B2
JPH0352890B2 JP60062279A JP6227985A JPH0352890B2 JP H0352890 B2 JPH0352890 B2 JP H0352890B2 JP 60062279 A JP60062279 A JP 60062279A JP 6227985 A JP6227985 A JP 6227985A JP H0352890 B2 JPH0352890 B2 JP H0352890B2
Authority
JP
Japan
Prior art keywords
disk
eccentricity
turntable
angle
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60062279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61219816A (ja
Inventor
Kenta Mikurya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP6227985A priority Critical patent/JPS61219816A/ja
Publication of JPS61219816A publication Critical patent/JPS61219816A/ja
Publication of JPH0352890B2 publication Critical patent/JPH0352890B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP6227985A 1985-03-27 1985-03-27 デイスク形状測定装置 Granted JPS61219816A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6227985A JPS61219816A (ja) 1985-03-27 1985-03-27 デイスク形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6227985A JPS61219816A (ja) 1985-03-27 1985-03-27 デイスク形状測定装置

Publications (2)

Publication Number Publication Date
JPS61219816A JPS61219816A (ja) 1986-09-30
JPH0352890B2 true JPH0352890B2 (en, 2012) 1991-08-13

Family

ID=13195540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6227985A Granted JPS61219816A (ja) 1985-03-27 1985-03-27 デイスク形状測定装置

Country Status (1)

Country Link
JP (1) JPS61219816A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1711603A (zh) 2002-11-06 2005-12-21 皇家飞利浦电子股份有限公司 用于确定旋转盘的角位置的装置与方法
JP5182536B2 (ja) * 2010-07-07 2013-04-17 パルステック工業株式会社 スタンパー偏心量測定方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5944699B2 (ja) * 1974-12-18 1984-10-31 株式会社日立製作所 偏心検出方式
JPS5288054A (en) * 1976-01-16 1977-07-22 Osaka Kiko Co Ltd Method of and apparatus for accurately measuring inner and outer diameter of work
JPS5853843A (ja) * 1981-09-25 1983-03-30 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS61219816A (ja) 1986-09-30

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