JPH0351797Y2 - - Google Patents
Info
- Publication number
- JPH0351797Y2 JPH0351797Y2 JP10553486U JP10553486U JPH0351797Y2 JP H0351797 Y2 JPH0351797 Y2 JP H0351797Y2 JP 10553486 U JP10553486 U JP 10553486U JP 10553486 U JP10553486 U JP 10553486U JP H0351797 Y2 JPH0351797 Y2 JP H0351797Y2
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- workpiece
- annular member
- movable
- handler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002093 peripheral effect Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Holding Or Fastening Of Disk On Rotational Shaft (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10553486U JPH0351797Y2 (enrdf_load_stackoverflow) | 1986-07-11 | 1986-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10553486U JPH0351797Y2 (enrdf_load_stackoverflow) | 1986-07-11 | 1986-07-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6313454U JPS6313454U (enrdf_load_stackoverflow) | 1988-01-28 |
| JPH0351797Y2 true JPH0351797Y2 (enrdf_load_stackoverflow) | 1991-11-07 |
Family
ID=30980056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10553486U Expired JPH0351797Y2 (enrdf_load_stackoverflow) | 1986-07-11 | 1986-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0351797Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-07-11 JP JP10553486U patent/JPH0351797Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6313454U (enrdf_load_stackoverflow) | 1988-01-28 |
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