JPH0351253B2 - - Google Patents

Info

Publication number
JPH0351253B2
JPH0351253B2 JP60115303A JP11530385A JPH0351253B2 JP H0351253 B2 JPH0351253 B2 JP H0351253B2 JP 60115303 A JP60115303 A JP 60115303A JP 11530385 A JP11530385 A JP 11530385A JP H0351253 B2 JPH0351253 B2 JP H0351253B2
Authority
JP
Japan
Prior art keywords
ion
mass spectrometer
ions
primary
belt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60115303A
Other languages
English (en)
Japanese (ja)
Other versions
JPS617556A (ja
Inventor
Hideki Kanbara
Hiroshi Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60115303A priority Critical patent/JPS617556A/ja
Publication of JPS617556A publication Critical patent/JPS617556A/ja
Publication of JPH0351253B2 publication Critical patent/JPH0351253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H01J49/142—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers using a solid target which is not previously vapourised

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
JP60115303A 1985-05-30 1985-05-30 二次イオン質量分析計 Granted JPS617556A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60115303A JPS617556A (ja) 1985-05-30 1985-05-30 二次イオン質量分析計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60115303A JPS617556A (ja) 1985-05-30 1985-05-30 二次イオン質量分析計

Publications (2)

Publication Number Publication Date
JPS617556A JPS617556A (ja) 1986-01-14
JPH0351253B2 true JPH0351253B2 (OSRAM) 1991-08-06

Family

ID=14659289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60115303A Granted JPS617556A (ja) 1985-05-30 1985-05-30 二次イオン質量分析計

Country Status (1)

Country Link
JP (1) JPS617556A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6251144A (ja) * 1985-08-29 1987-03-05 Hitachi Ltd 質量分析計
JPH07118296B2 (ja) * 1988-04-02 1995-12-18 国立環境研究所長 小泉 明 高圧質量分析法のためのイオン化法
JPH0748371B2 (ja) * 1988-04-02 1995-05-24 国立環境研究所長 小泉 明 高圧質量分析法のためのイオン化方法及び装置
WO2007139425A1 (fr) * 2006-05-29 2007-12-06 Blashenkov Nikolai Mikhailovic Ioniseur à bande d'une source d'ions d'un spectromètre en masse

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5812978B2 (ja) * 1976-11-19 1983-03-11 株式会社日立製作所 イオン線装置

Also Published As

Publication number Publication date
JPS617556A (ja) 1986-01-14

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